Inventor · disambiguated record
Herman Boom
Also filed as: BOOM HERMAN
22 granted patents·2 pending applications·170 citations·filing 2004–2020
96Inventor score
Technology areasG03F
Files withASML NETHERLANDS BV16CADEE THEODORUS PETRUS MARIA2STREEFKERK BOB2ASML HOLDING NV1BOOM HERMAN1
Top patents by PatentIndex Score
24 records- 0197US9952515B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Apr 24, 2018·6 cites·20 claims
- 0296US9134623B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Sep 15, 2015·8 cites·21 claims
- 0396US9134622B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Sep 15, 2015·9 cites·29 claims
- 0496US8634056B2Lithographic apparatus and device manufacturing methodSTREEFKERK BOB·Filed 2011·Granted Jan 21, 2014·10 cites·21 claims
- 0596US7804575B2Lithographic apparatus and device manufacturing method having liquid evaporation controlASML NETHERLANDS BV·Filed 2005·Granted Sep 28, 2010·23 cites·44 claims
- 0696US7528929B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted May 5, 2009·46 cites·35 claims
- 0795US10345712B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Jul 9, 2019·3 cites·20 claims
- 0894US11378893B2Lithographic apparatus and device manufacturing method involving a heaterASML NETHERLANDS BV·Filed 2020·Granted Jul 5, 2022·2 cites·20 claims
- 0992US8547519B2Lithographic apparatus and device manufacturing methodSTREEFKERK BOB·Filed 2009·Granted Oct 1, 2013·8 cites·18 claims
- 1092US7751027B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Jul 6, 2010·18 cites·65 claims
- 1189US9188880B2Lithographic apparatus and device manufacturing method involving a heaterCADEE THEODORUS PETRUS MARIA·Filed 2011·Granted Nov 17, 2015·4 cites·32 claims
- 1288US9268242B2Lithographic apparatus and device manufacturing method involving a heater and a temperature sensorCADEE THEODORUS PETRUS MARIA·Filed 2010·Granted Feb 23, 2016·4 cites·38 claims
- 1387US9268236B2Lithographic apparatus and device manufacturing method having heat pipe with fluid to cool substrate and/or substrate holderJACOBS JOHANNES HENRICUS WILHELMUS·Filed 2010·Granted Feb 23, 2016·5 cites·27 claims
- 1486US10838310B2Lithographic apparatus and device manufacturing method involving a heaterASML NETHERLANDS BV·Filed 2019·Granted Nov 17, 2020·1 cites·20 claims
- 1585US7808614B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2008·Granted Oct 5, 2010·6 cites·19 claims
- 1678US7969549B2Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Jun 28, 2011·4 cites·25 claims
- 1776US8237912B2Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing methodBOOM HERMAN·Filed 2011·Granted Aug 7, 2012·3 cites·20 claims
- 1876US7843552B2Lithographic apparatus, device manufacturing method, and mask having a pellicle attached heretoASML NETHERLANDS BV·Filed 2005·Granted Nov 30, 2010·5 cites·16 claims
- 1971US2019324374A1Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Application pending·0 cites
- 2063US10254663B2Lithographic apparatus and device manufacturing method involving a heaterASML NETHERLANDS BV·Filed 2015·Granted Apr 9, 2019·0 cites·38 claims
- 2156US7522261B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Apr 21, 2009·3 cites·29 claims
- 2250US7136152B2Method for bonding a pellicle to a patterning device and patterning device comprising a pellicleASML HOLDING NV·Filed 2004·Granted Nov 14, 2006·2 cites·16 claims
- 2350US2008137049A1Lithographic apparatus, device manufacturing methods, mask and method of characterizing a mask and/or pellicleASML NETHERLANDS BV·Filed 2008·Application pending·0 cites
- 2447US8427629B2Lithographic apparatus and device manufacturing methodLUIJTEN CARLO CORNELIS MARIA·Filed 2010·Granted Apr 23, 2013·0 cites·20 claims
Join the waitlist — get patent alerts
Get an alert when Herman Boom files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →