Inventor · disambiguated record
Jong Hwan An
Also filed as: AN JONG-HWAN
13 granted patents·9 pending applications·13 citations·filing 2016–2025
85Inventor score
Top patents by PatentIndex Score
22 records- 0191US11545340B2Apparatus for monitoring pulsed high-frequency power and substrate processing apparatus including the sameSEMES CO LTD·Filed 2020·Granted Jan 3, 2023·4 cites·20 claims
- 0290US11823874B2Substrate treating apparatus and method for controlling temperature of ferrite coreSEMES CO LTD·Filed 2021·Granted Nov 21, 2023·2 cites·16 claims
- 0380US10867775B2Apparatus and method for treating substrateSEMES CO LTD·Filed 2017·Granted Dec 15, 2020·4 cites·9 claims
- 0473US11587770B2Apparatus and method for treating substrateSEMES CO LTD·Filed 2020·Granted Feb 21, 2023·1 cites·13 claims
- 0572US10753800B2Calibrator of an optical emission spectroscopySAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Aug 25, 2020·1 cites·20 claims
- 0670US10600618B2Plasma generation apparatus, substrate treating apparatus including the same, and control method for the plasma generation apparatusSEMES CO LTD·Filed 2019·Granted Mar 24, 2020·1 cites·24 claims
- 0763US2025166977A1Substrate treating apparatus and substrate support unitSEMES CO LTD·Filed 2025·Application pending·0 cites
- 0861US12249491B2Substrate treating apparatus and substrate support unitSEMES CO LTD·Filed 2021·Granted Mar 11, 2025·0 cites·9 claims
- 0957US12456606B2Support unit and apparatus for treating substrateSEMES CO LTD·Filed 2021·Granted Oct 28, 2025·0 cites·19 claims
- 1051US2017103871A1Apparatus for monitoring pulsed high-frequency power and substrate processing apparatus including the sameSEMES CO LTD·Filed 2016·Application pending·0 cites
- 1149US2022208513A1Substrate treating apparatusSEMES CO LTD·Filed 2021·Application pending·0 cites
- 1248US2022181118A1Apparatus for generating plasma, apparatus for treating substrate including the same, and method for controlling the sameSEMES CO LTD·Filed 2021·Application pending·0 cites
- 1340US11244847B2Substrate treating apparatus and substrate treating methodSEMES CO LTD·Filed 2018·Granted Feb 8, 2022·0 cites·7 claims
- 1440US10319566B2Apparatus for supplying power and apparatus for treating substrate including the sameSEMES CO LTD·Filed 2018·Granted Jun 11, 2019·0 cites·12 claims
- 1539US12125678B2Filter unit, substrate treating apparatus including the same, and substrate treating methodSEMES CO LTD·Filed 2020·Granted Oct 22, 2024·0 cites·12 claims
- 1639US11869749B2Substrate processing apparatus and method of manufacturing thereofSEMES CO LTD·Filed 2019·Granted Jan 9, 2024·0 cites·13 claims
- 1739US11195705B2Plasma generating unit and substrate treating apparatus comprising the sameSEMES CO LTD·Filed 2018·Granted Dec 7, 2021·0 cites·17 claims
- 1838US2020411298A1Apparatus and method for treating substrateSEMES CO LTD·Filed 2020·Application pending·0 cites
- 1936US2019088449A1Substrate treating apparatus and substrate treating methodSEMES CO LTD·Filed 2018·Application pending·0 cites
- 2035US2018102238A1Substrate support unit, substrate treating apparatus including the same, and method for controlling the sameSEMES CO LTD·Filed 2017·Application pending·0 cites
- 2134US2019131115A1Support unit and substrate treating apparatus including the sameSEMES CO LTD·Filed 2018·Application pending·0 cites
- 2234US2017316920A1Apparatus and method for treating a substrateSEMES CO LTD·Filed 2017·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →