Inventor · disambiguated record
Antti Niskanen
Also filed as: NISKANEN ANTTI · NISKANEN ANTTI J · NISKANEN ANTTI JUHANI
70 granted patents·15 pending applications·7,694 citations·filing 2002–2024
99Inventor score
Top patents by PatentIndex Score
85 records- 0199US10443123B2Dual selective depositionASM IP HOLDING BV·Filed 2018·Granted Oct 15, 2019·46 cites·21 claims
- 0299US10047435B2Dual selective depositionASM IP HOLDING BV·Filed 2015·Granted Aug 14, 2018·463 cites·52 claims
- 0399US9895715B2Selective deposition of metals, metal oxides, and dielectricsASM IP HOLDING BV·Filed 2015·Granted Feb 20, 2018·525 cites·27 claims
- 0499US9368352B2Methods for forming doped silicon oxide thin filmsASM INT·Filed 2014·Granted Jun 14, 2016·469 cites·19 claims
- 0599US9257303B2Selective formation of metallic films on metallic surfacesASM INT·Filed 2015·Granted Feb 9, 2016·82 cites·19 claims
- 0699US9153441B2Methods for forming doped silicon oxide thin filmsASM INT·Filed 2014·Granted Oct 6, 2015·473 cites·17 claims
- 0799US8679958B2Methods for forming doped silicon oxide thin filmsASM INT·Filed 2012·Granted Mar 25, 2014·484 cites·26 claims
- 0898US11213853B2Selective deposition of metals, metal oxides, and dielectricsASM IP HOLDING BV·Filed 2019·Granted Jan 4, 2022·9 cites·20 claims
- 0998US10741386B2Deposition of SiNASM IP HOLDING BV·Filed 2019·Granted Aug 11, 2020·282 cites·23 claims
- 1098US10480064B2Reaction chamber passivation and selective deposition of metallic filmsASM IP HOLDING BV·Filed 2018·Granted Nov 19, 2019·47 cites·20 claims
- 1198US10456808B2Selective deposition of metals, metal oxides, and dielectricsASM IP HOLDING BV·Filed 2018·Granted Oct 29, 2019·12 cites·20 claims
- 1298US10424477B2Si precursors for deposition of SiN at low temperaturesASM IP HOLDING BV·Filed 2017·Granted Sep 24, 2019·298 cites·24 claims
- 1398US10395917B2Si precursors for deposition of SiN at low temperaturesASM IP HOLDING BV·Filed 2018·Granted Aug 27, 2019·405 cites·19 claims
- 1498US10157786B2Selective formation of metallic films on metallic surfacesASM INT NV·Filed 2016·Granted Dec 18, 2018·55 cites·21 claims
- 1598US10147600B2Methods for forming doped silicon oxide thin filmsASM INT NV·Filed 2018·Granted Dec 4, 2018·417 cites·20 claims
- 1698US10049924B2Selective formation of metallic films on metallic surfacesASM INT NV·Filed 2017·Granted Aug 14, 2018·53 cites·20 claims
- 1798US10041166B2Reaction chamber passivation and selective deposition of metallic filmsASM IP HOLDING BV·Filed 2017·Granted Aug 7, 2018·57 cites·20 claims
- 1898US9905416B2Si precursors for deposition of SiN at low temperaturesASM IP HOLDING BV·Filed 2017·Granted Feb 27, 2018·19 cites·19 claims
- 1998US9875893B2Methods for forming doped silicon oxide thin filmsASM INT NV·Filed 2017·Granted Jan 23, 2018·419 cites·20 claims
- 2098US9824881B2Si precursors for deposition of SiN at low temperaturesASM IP HOLDING BV·Filed 2013·Granted Nov 21, 2017·304 cites·25 claims
- 2198US9803277B1Reaction chamber passivation and selective deposition of metallic filmsASM IP HOLDING BV·Filed 2016·Granted Oct 31, 2017·87 cites·19 claims
- 2298US9679808B2Selective formation of metallic films on metallic surfacesASM INT NV·Filed 2016·Granted Jun 13, 2017·57 cites·20 claims
- 2398US9564314B2Methods for forming doped silicon oxide thin filmsASM INT NV·Filed 2015·Granted Feb 7, 2017·465 cites·28 claims
- 2498US9502289B2Selective formation of metallic films on metallic surfacesASM INT NV·Filed 2015·Granted Nov 22, 2016·86 cites·31 claims
- 2598US9112003B2Selective formation of metallic films on metallic surfacesASM INT·Filed 2012·Granted Aug 18, 2015·93 cites·30 claims
- 2698US8956971B2Selective formation of metallic films on metallic surfacesHAUKKA SUVI P·Filed 2011·Granted Feb 17, 2015·565 cites·28 claims
- 2798US8912101B2Method for forming Si-containing film using two precursors by ALDASM IP HOLDING BV·Filed 2013·Granted Dec 16, 2014·522 cites·17 claims
- 2898US8846502B2Methods for depositing thin films comprising gallium nitride by atomic layer depositionHAUKKA SUVI·Filed 2012·Granted Sep 30, 2014·470 cites·35 claims
- 2997US10115603B2Removal of surface passivationASM IP HOLDING BV·Filed 2016·Granted Oct 30, 2018·48 cites·9 claims
- 3097US9576792B2Deposition of SiNASM IP HOLDING BV·Filed 2015·Granted Feb 21, 2017·23 cites·28 claims
- 3197US9564309B2Si precursors for deposition of SiN at low temperaturesASM IP HOLDING BV·Filed 2014·Granted Feb 7, 2017·29 cites·16 claims
- 3297US9490145B2Removal of surface passivationASM IP HOLDING BV·Filed 2015·Granted Nov 8, 2016·78 cites·21 claims
- 3396US10793946B1Reaction chamber passivation and selective deposition of metallic filmsASM IP HOLDING BV·Filed 2019·Granted Oct 6, 2020·17 cites·21 claims
- 3496US10741411B2Removal of surface passivationASM IP HOLDING BV·Filed 2018·Granted Aug 11, 2020·19 cites·19 claims
- 3596US6858546B2Method of depositing rare earth oxide thin filmsASM INTERNATIONAL NV·Filed 2002·Granted Feb 22, 2005·120 cites·22 claims
- 3695US11286562B2Gas-phase chemical reactor and method of using sameASM IP HOLDING BV·Filed 2018·Granted Mar 29, 2022·6 cites·17 claims
- 3794US11081342B2Selective deposition using hydrophobic precursorsASM IP HOLDING BV·Filed 2017·Granted Aug 3, 2021·8 cites·23 claims
- 3893US10262854B2Deposition of SiNASM IP HOLDING BV·Filed 2017·Granted Apr 16, 2019·6 cites·19 claims
- 3993US7498272B2Method of depositing rare earth oxide thin filmsASM INT·Filed 2004·Granted Mar 3, 2009·47 cites·24 claims
- 4092US10612137B2Organic reactants for atomic layer depositionASM IP HOLDING BV·Filed 2016·Granted Apr 7, 2020·3 cites·19 claims
- 4192US10510530B2Methods for forming doped silicon oxide thin filmsASM INT NV·Filed 2018·Granted Dec 17, 2019·3 cites·18 claims
- 4291US11062914B2Removal of surface passivationASM IP HOLDING BV·Filed 2020·Granted Jul 13, 2021·2 cites·20 claims
- 4390US11069522B2Si precursors for deposition of SiN at low temperaturesASM IP HOLDING BV·Filed 2019·Granted Jul 20, 2021·3 cites·18 claims
- 4490US11047040B2Dual selective depositionASM IP HOLDING BV·Filed 2019·Granted Jun 29, 2021·3 cites·18 claims
- 4589US11525184B2Dual selective depositionASM IP HOLDING BV·Filed 2021·Granted Dec 13, 2022·1 cites·22 claims
- 4689US10784105B2Methods for forming doped silicon oxide thin filmsASM INT NV·Filed 2019·Granted Sep 22, 2020·2 cites·20 claims
- 4787US11302527B2Methods for forming doped silicon oxide thin filmsASM INT NV·Filed 2020·Granted Apr 12, 2022·1 cites·20 claims
- 4882US11975357B2Selective deposition of metals, metal oxides, and dielectricsASM IP HOLDING BV·Filed 2021·Granted May 7, 2024·0 cites·19 claims
- 4981US11430656B2Deposition of oxide thin filmsASM IP HOLDING BV·Filed 2016·Granted Aug 30, 2022·2 cites·21 claims
- 5081US2023031720A1Methods for forming doped silicon oxide thin filmsASM INT NV·Filed 2022·Application pending·0 cites
Showing the top 50 of 85 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →