Inventor · disambiguated record
Frank Dimeo, Jr.
Also filed as: DIMEO FRANK · DIMEO FRANK JR · DIMEO FRANK N · DIMEO JR FRANK
24 granted patents·10 pending applications·2,588 citations·filing 1979–2015
97Inventor score
Top patents by PatentIndex Score
34 records- 0198US7475588B2Apparatus and process for sensing fluoro species in semiconductor processing systemsADVANCED TECH MATERIALS·Filed 2005·Granted Jan 13, 2009·474 cites·64 claims
- 0298US7296460B2Apparatus and process for sensing fluoro species in semiconductor processing systemsADVANCED TECH MATERIALS·Filed 2005·Granted Nov 20, 2007·481 cites·23 claims
- 0398US7080545B2Apparatus and process for sensing fluoro species in semiconductor processing systemsADVANCED TECH MATERIALS·Filed 2002·Granted Jul 25, 2006·495 cites·81 claims
- 0498US5972430ADigital chemical vapor deposition (CVD) method for forming a multi-component oxide layerADVANCED TECH MATERIALS·Filed 1997·Granted Oct 26, 1999·417 cites·24 claims
- 0597US6596236B2Micro-machined thin film sensor arrays for the detection of H2 containing gases, and method of making and using the sameADVANCED TECH MATERIALS·Filed 2001·Granted Jul 22, 2003·129 cites·43 claims
- 0695US7966879B2Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vesselADVANCED TECH MATERIALS·Filed 2005·Granted Jun 28, 2011·25 cites·53 claims
- 0795US4271370ADouble air gap printed circuit rotorLITTON SYSTEMS INC·Filed 1979·Granted Jun 2, 1981·66 cites·4 claims
- 0892US7862646B2Nanoporous articles and methods of making sameADVANCED TECH MATERIALS·Filed 2008·Granted Jan 4, 2011·20 cites·20 claims
- 0992US6265222B1Micro-machined thin film hydrogen gas sensor, and method of making and using the sameFiled 1999·Granted Jul 24, 2001·116 cites·46 claims
- 1091US8221532B2Nanoporous articles and methods of making sameCARRUTHERS J DONALD·Filed 2011·Granted Jul 17, 2012·14 cites·16 claims
- 1189US6254792B1Isotropic dry cleaning process for noble metal integrated circuit structuresADVANCED TECH MATERIALS·Filed 1998·Granted Jul 3, 2001·78 cites·44 claims
- 1288US8603252B2Cleaning of semiconductor processing systemsDIMEO FRANK·Filed 2007·Granted Dec 10, 2013·21 cites·6 claims
- 1388US8555705B2Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vesselDIETZ JAMES·Filed 2011·Granted Oct 15, 2013·8 cites·20 claims
- 1486US9170246B2Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vesselENTEGRIS INC·Filed 2013·Granted Oct 27, 2015·4 cites·17 claims
- 1586US6143191AMethod for etch fabrication of iridium-based electrode structuresADVANCED TECH MATERIALS·Filed 1997·Granted Nov 7, 2000·79 cites·25 claims
- 1685US6897960B2Optical hydrogen detectorFiled 2002·Granted May 24, 2005·23 cites·15 claims
- 1783US7819981B2Methods for cleaning ion implanter componentsADVANCED TECH MATERIALS·Filed 2004·Granted Oct 26, 2010·16 cites·39 claims
- 1882US7296458B2Nickel-coated free-standing silicon carbide structure for sensing fluoro or halogen species in semiconductor processing systems, and processes of making and using sameADVANCED TECH MATERIALS·Filed 2004·Granted Nov 20, 2007·21 cites·38 claims
- 1982US7228724B2Apparatus and process for sensing target gas species in semiconductor processing systemsADVANCED TECH MATERIALS·Filed 2004·Granted Jun 12, 2007·19 cites·41 claims
- 2080US7370511B1Gas sensor with attenuated drift characteristicMST TECHNOLOGY GMBH·Filed 2004·Granted May 13, 2008·18 cites·50 claims
- 2179US6846424B2Plasma-assisted dry etching of noble metal-based materialsADVANCED TECH MATERIALS·Filed 2001·Granted Jan 25, 2005·24 cites·48 claims
- 2279US6709610B2Isotropic dry cleaning process for noble metal integrated circuit structuresADVANCED TECH MATERIALS·Filed 2001·Granted Mar 23, 2004·14 cites·17 claims
- 2378US8109130B2Apparatus and process for sensing fluoro species in semiconductor processing systemsDIMEO JR FRANK·Filed 2009·Granted Feb 7, 2012·8 cites·22 claims
- 2470US4693505ARobot gripperLITTON SYSTEMS INC·Filed 1986·Granted Sep 15, 1987·18 cites·7 claims
- 2559US2016041136A1Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vesselENTEGRIS INC·Filed 2015·Application pending·0 cites
- 2656US2012305450A1Nanoporous articles and methods of making sameCARRUTHERS J DONALD·Filed 2012·Application pending·0 cites
- 2753US2009095713A1Novel methods for cleaning ion implanter componentsADVANCED TECH MATERIALS·Filed 2005·Application pending·0 cites
- 2849US2008134757A1Method And Apparatus For Monitoring Plasma Conditions In An Etching Plasma Processing FacilityADVANCED TECH MATERIALS·Filed 2006·Application pending·0 cites
- 2949US2003153088A1Micro-machined thin film sensor arrays for the detection of H2, NH3, and sulfur containing gases, and method of making and using the sameFiled 2003·Application pending·0 cites
- 3047US2002154310A1Optical hydrogen detectorFiled 2002·Application pending·0 cites
- 3145US2004223884A1Chemical sensor responsive to change in volume of material exposed to target particleFiled 2003·Application pending·0 cites
- 3242US2004093928A1Rare earth metal sensorFiled 2002·Application pending·0 cites
- 3340US2004163445A1Apparatus and process for sensing fluoro species in semiconductor processing systemsFiled 2004·Application pending·0 cites
- 3439US2008245676A1Material Containment SystemMCMANUS JAMES V·Filed 2006·Application pending·0 cites
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