Inventor · disambiguated record
Karey Holland
Also filed as: HOLLAND KAREY · HOLLAND KAREY L
7 granted patents·465 citations·filing 1985–2015
88Inventor score
Top patents by PatentIndex Score
7 records- 0196US4786360AAnisotropic etch process for tungsten metallurgyIBM·Filed 1987·Granted Nov 22, 1988·229 cites·9 claims
- 0292US4919750AEtching metal films with complexing chloride plasmaIBM·Filed 1989·Granted Apr 24, 1990·132 cites·7 claims
- 0391US9180570B2Grooved CMP padKERPRICH ROBERT·Filed 2009·Granted Nov 10, 2015·18 cites·19 claims
- 0474US6261158B1Multi-step chemical mechanical polishingSPEEDFAM IPEC·Filed 1998·Granted Jul 17, 2001·57 cites·42 claims
- 0572US9375823B2Grooved CMP padsKERPRICH ROBERT·Filed 2015·Granted Jun 28, 2016·1 cites·6 claims
- 0653US6234883B1Method and apparatus for concurrent pad conditioning and wafer buff in chemical mechanical polishingLSI LOGIC CORP·Filed 1997·Granted May 22, 2001·16 cites·14 claims
- 0735US4624740ATailoring of via-hole sidewall slopeIBM·Filed 1985·Granted Nov 25, 1986·12 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →