Assignee
SPEEDFAM IPEC
US3 patents
Top patents by PatentIndex Score
US6572445B2Jun 3, 2003
Multizone slurry delivery for chemical mechanical polishing tool
SPEEDFAM IPEC25 citations91
US6261158B1Jul 17, 2001
Multi-step chemical mechanical polishing
SPEEDFAM IPEC57 citations90
US6095900AAug 1, 2000
Method for manufacturing a workpiece carrier backing pad and pressure plate for polishing semiconductor wafers
SPEEDFAM IPEC35 citations89