Inventor · disambiguated record
Jeffrey T. Fanton
Also filed as: FANTON JEFFREY · FANTON JEFFREY T · FANTON JEFFREY THOMAS
29 granted patents·1 pending application·1,321 citations·filing 1991–2024
97Inventor score
Files withTHERMA WAVE INC18NOVA MEASURING INSTR INC5KLA TENCOR CORP2FANTON JEFFREY T1ONTO INNOVATION INC1
Top patents by PatentIndex Score
30 records- 0199US5181080AMethod and apparatus for evaluating the thickness of thin filmsTHERMA WAVE INC·Filed 1991·Granted Jan 19, 1993·291 cites·34 claims
- 0298US5900939AThin film optical measurement system and method with calibrating ellipsometerTHERMA WAVE INC·Filed 1998·Granted May 4, 1999·174 cites·13 claims
- 0398US5798837AThin film optical measurement system and method with calibrating ellipsometerTHERMA WAVE INC·Filed 1997·Granted Aug 25, 1998·233 cites·27 claims
- 0497US9588066B2Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS)POIS HEATH A·Filed 2014·Granted Mar 7, 2017·44 cites·10 claims
- 0596US5596411AIntegrated spectroscopic ellipsometerTHERMA WAVE INC·Filed 1996·Granted Jan 21, 1997·205 cites·22 claims
- 0695US10119925B2Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS)NOVA MEASURING INSTR INC·Filed 2017·Granted Nov 6, 2018·7 cites·25 claims
- 0795US6411385B2Thin film optical measurement system and method with calibrating ellipsometerTHERMA WAVE INC·Filed 2001·Granted Jun 25, 2002·54 cites·12 claims
- 0894US6515746B2Thin film optical measurement system and method with calibrating ellipsometerTHERMA WAVE INC·Filed 2002·Granted Feb 4, 2003·42 cites·22 claims
- 0992US10481112B2Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS)NOVA MEASURING INSTR INC·Filed 2018·Granted Nov 19, 2019·4 cites·20 claims
- 1091US10859519B2Methods and systems for measuring periodic structures using multi-angle x-ray reflectance scatterometry (XRS)NOVA MEASURING INSTR INC·Filed 2019·Granted Dec 8, 2020·3 cites·25 claims
- 1191US6934025B2Thin film optical measurement system and method with calibrating ellipsometerTHERMA WAVE INC·Filed 2004·Granted Aug 23, 2005·30 cites·19 claims
- 1291US6304326B1Thin film optical measurement system and method with calibrating ellipsometerTHERMA WAVE INC·Filed 1999·Granted Oct 16, 2001·72 cites·28 claims
- 1390US7061614B2Measurement system with separate optimized beam pathsTHERMA WAVE INC·Filed 2002·Granted Jun 13, 2006·43 cites·24 claims
- 1488US12360063B2System and method for measuring a sample by x-ray reflectance scatterometryNOVA MEASURING INSTR INC·Filed 2024·Granted Jul 15, 2025·0 cites·20 claims
- 1588US7116424B2Modulated reflectance measurement system with multiple wavelengthsTHERMA WAVE INC·Filed 2005·Granted Oct 3, 2006·9 cites·7 claims
- 1688US6744850B2X-ray reflectance measurement system with adjustable resolutionTHERMA WAVE INC·Filed 2001·Granted Jun 1, 2004·35 cites·33 claims
- 1785US7106446B2Modulated reflectance measurement system with multiple wavelengthsTHERMA WAVE INC·Filed 2003·Granted Sep 12, 2006·18 cites·18 claims
- 1880US9240254B2System and method for characterizing a film by X-ray photoelectron and low-energy X-ray fluorescence spectroscopySCHUELER BRUNO W·Filed 2011·Granted Jan 19, 2016·5 cites·16 claims
- 1978US6753962B2Thin film optical measurement system and method with calibrating ellipsometerTHERMA WAVE INC·Filed 2002·Granted Jun 22, 2004·12 cites·27 claims
- 2077US7619741B2Modulated reflectance measurement system with multiple wavelengthsKLA TENCOR CORP·Filed 2008·Granted Nov 17, 2009·3 cites·16 claims
- 2177US7423757B2Modulated reflectance measurement system with multiple wavelengthsKLA TENCOR CORP·Filed 2006·Granted Sep 9, 2008·3 cites·18 claims
- 2273US7227637B2Measurement system with separate optimized beam pathsTHERMA WAVE INC·Filed 2006·Granted Jun 5, 2007·6 cites·21 claims
- 2372US11874237B2System and method for measuring a sample by x-ray reflectance scatterometryNOVA MEASURING INSTR INC·Filed 2020·Granted Jan 16, 2024·0 cites·19 claims
- 2471US7079249B2Modulated reflectance measurement system with fiber laser technologyTHERMA WAVE INC·Filed 2003·Granted Jul 18, 2006·9 cites·3 claims
- 2571US7054006B2Self-calibrating beam profile ellipsometerTHERMA WAVE INC·Filed 2004·Granted May 30, 2006·14 cites·14 claims
- 2662US6707056B2Stage rotation system to improve edge measurementsTHERMA WAVE INC·Filed 2002·Granted Mar 16, 2004·3 cites·2 claims
- 2760US6885019B2Sample positioning system to improve edge measurementsTHERMA WAVE INC·Filed 2004·Granted Apr 26, 2005·2 cites·4 claims
- 2856US10746530B2Optical metrology device for measuring samples having thin or thick filmsONTO INNOVATION INC·Filed 2018·Granted Aug 18, 2020·0 cites·33 claims
- 2948US9297771B2Methods and systems for fabricating platelets of a monochromator for X-ray photoelectron spectroscopyFANTON JEFFREY T·Filed 2013·Granted Mar 29, 2016·0 cites·18 claims
- 3041US2007076976A1Methods for eliminating artifacts in two-dimensional optical metrologyUHRICH CRAIG·Filed 2006·Application pending·0 cites
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