Inventor · disambiguated record
Nikolay Artemiev
Also filed as: ARTEMIEV NIKOLAY
8 granted patents·1 pending application·40 citations·filing 2017–2024
84Inventor score
Top patents by PatentIndex Score
9 records- 0194US11333621B2Methods and systems for semiconductor metrology based on polychromatic soft X-Ray diffractionKLA TENCOR CORP·Filed 2018·Granted May 17, 2022·10 cites·27 claims
- 0294US11143604B1Soft x-ray optics with improved filteringKLA CORP·Filed 2020·Granted Oct 12, 2021·4 cites·9 claims
- 0394US10481111B2Calibration of a small angle X-ray scatterometry based metrology systemKLA TENCOR CORP·Filed 2017·Granted Nov 19, 2019·11 cites·22 claims
- 0491US10859518B2X-ray zoom lens for small angle x-ray scatterometryKLA TENCOR CORP·Filed 2017·Granted Dec 8, 2020·5 cites·25 claims
- 0590US10359377B2Beam shaping slit for small spot size transmission small angle X-ray scatterometryKLA TENCOR CORP·Filed 2017·Granted Jul 23, 2019·5 cites·20 claims
- 0685US10816486B2Multilayer targets for calibration and alignment of X-ray based measurement systemsKLA TENCOR CORP·Filed 2019·Granted Oct 27, 2020·2 cites·28 claims
- 0783US11073487B2Methods and systems for characterization of an x-ray beam with high spatial resolutionKLA TENCOR CORP·Filed 2018·Granted Jul 27, 2021·3 cites·35 claims
- 0876US2024288388A1Soft X-Ray Optics With Improved FilteringKLA CORP·Filed 2024·Application pending·0 cites
- 0971US12025575B2Soft x-ray optics with improved filteringKLA CORP·Filed 2021·Granted Jul 2, 2024·0 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →