Inventor · disambiguated record
Yasuyo Muto
Also filed as: MUTO YASUYO
2 granted patents·1 pending application·18 citations·filing 2003–2005
59Inventor score
Technology areasH10P
Files withCANON KK3
Top patents by PatentIndex Score
3 records- 0166US7425238B2Substrate holding deviceCANON KK·Filed 2003·Granted Sep 16, 2008·13 cites·17 claims
- 0257US6965428B2Stage apparatus, exposure apparatus, and semiconductor device manufacturing methodCANON KK·Filed 2003·Granted Nov 15, 2005·5 cites·23 claims
- 0346US2006017909A1Stage apparatus, exposure apparatus, and semiconductor device manufacturing mehtodCANON KK·Filed 2005·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Yasuyo Muto files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →