US2006017909A1PendingUtilityA1
Stage apparatus, exposure apparatus, and semiconductor device manufacturing mehtod
Est. expiryNov 13, 2022(expired)· nominal 20-yr term from priority
H10P 72/7626H10P 72/50H10P 72/7624Y10T279/23G03F 7/70716G03F 7/707
46
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Claims
Abstract
A stage apparatus has a substrate holding unit which chucks and holds a substrate, and includes a flat surface having a recess where the substrate holding unit is to be mounted. A fixing member fixes a projection support provided to the substrate holding unit onto the flat surface. The substrate holding unit is supported by the fixing member while a distal end of the projection support is in contact with the recess of the flat surface and the remaining portion of the substrate holding unit is not in contact with the flat surface.
Claims
exact text as granted — not AI-modified1 . A stage apparatus having a substrate holding unit which chucks and holds a substrate, comprising:
a flat surface having a recess where said substrate holding unit is to be mounted; and a fixing member which fixes a projection support provided to said substrate holding unit onto the flat surface, wherein said substrate holding unit is supported by said fixing member while a distal end of said projection support is in contact with the recess of the flat surface and a remaining portion of said substrate holding unit is not in contact with the flat surface.
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