Inventor · disambiguated record
Lakshminarayana Nittala
Also filed as: NITTALA LAKSHMINARAYANA
5 granted patents·2 pending applications·511 citations·filing 2009–2014
85Inventor score
Technology areasH10P
Top patents by PatentIndex Score
7 records- 0196US8685867B1Premetal dielectric integration processDANEK MICHAL·Filed 2011·Granted Apr 1, 2014·55 cites·26 claims
- 0296US8278224B1Flowable oxide deposition using rapid delivery of process gasesMUI COLLIN K L·Filed 2009·Granted Oct 2, 2012·396 cites·21 claims
- 0394US8728958B2Gap fill integrationASHTIANI KAIHAN·Filed 2010·Granted May 20, 2014·26 cites·23 claims
- 0493US9257302B1CVD flowable gap fillWANG FENG·Filed 2012·Granted Feb 9, 2016·16 cites·17 claims
- 0593US9064684B1Flowable oxide deposition using rapid delivery of process gasesMUI COLLIN K L·Filed 2012·Granted Jun 23, 2015·18 cites·19 claims
- 0653US2014302689A1Methods and apparatus for dielectric depositionNOVELLUS SYSTEMS INC·Filed 2014·Application pending·0 cites
- 0734US2012149213A1Bottom up fill in high aspect ratio trenchesNITTALA LAKSHMINARAYANA·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →