Inventor · disambiguated record
Robert Griffith O'Neill
Also filed as: O'NEILL ROBERT G · O'NEILL ROBERT GRIFFITH
10 granted patents·7 pending applications·57 citations·filing 2008–2024
88Inventor score
Top patents by PatentIndex Score
17 records- 0194US9873940B2Coating system and method for coating interior fluid wetted surfaces of a component of a semiconductor substrate processing apparatusLAM RES CORP·Filed 2014·Granted Jan 23, 2018·16 cites·9 claims
- 0291US10658222B2Moveable edge coupling ring for edge process control during semiconductor wafer processingLAM RES CORP·Filed 2015·Granted May 19, 2020·7 cites·18 claims
- 0384US9123651B2Dense oxide coated component of a plasma processing chamber and method of manufacture thereofLAM RES CORP·Filed 2013·Granted Sep 1, 2015·6 cites·12 claims
- 0482US2024355667A1Edge ring arrangement with moveable edge ringsLAM RES CORP·Filed 2024·Application pending·0 cites
- 0581US9546432B2Dense oxide coated component of a plasma processing chamber and method of manufacture thereofLAM RES CORP·Filed 2015·Granted Jan 17, 2017·3 cites·10 claims
- 0681US9337002B2Corrosion resistant aluminum coating on plasma chamber componentsLAM RES CORP·Filed 2013·Granted May 10, 2016·6 cites·21 claims
- 0781US8060330B2Method and system for centering wafer on chuckO'NEILL ROBERT GRIFFITH·Filed 2008·Granted Nov 15, 2011·12 cites·20 claims
- 0880US9767996B2Application of powered electrostatic faraday shield to recondition dielectric window in ICP plasmasLAM RES CORP·Filed 2015·Granted Sep 19, 2017·3 cites·17 claims
- 0972US12027410B2Edge ring arrangement with moveable edge ringsLAM RES CORP·Filed 2021·Granted Jul 2, 2024·0 cites·18 claims
- 1069US9435692B2Calculating power input to an array of thermal control elements to achieve a two-dimensional temperature outputLAM RES CORP·Filed 2014·Granted Sep 6, 2016·2 cites·20 claims
- 1164US2018127868A1Coating system and method for coating interior fluid wetted surfaces of a component of a semiconductor substrate processing apparatusLAM RES CORP·Filed 2017·Application pending·0 cites
- 1263US9412670B2System, method and apparatus for RF power compensation in plasma etch chamberLAM RES CORP·Filed 2013·Granted Aug 9, 2016·2 cites·19 claims
- 1359US2019013232A1Moveable edge ring designLAM RES CORP·Filed 2018·Application pending·0 cites
- 1454US2024404804A1Reference Box for Direct-Drive Radiofrequency Power SupplyLAM RES CORP·Filed 2022·Application pending·0 cites
- 1542US2013102156A1Components of plasma processing chambers having textured plasma resistant coatingsLAM RES CORP·Filed 2012·Application pending·0 cites
- 1642US2015187615A1Component of a plasma processing apparatus including an electrically conductive and nonmagnetic cold sprayed coatingLAM RES CORP·Filed 2014·Application pending·0 cites
- 1736US2014034242A1Edge ring assembly for plasma processing chamber and method of manufacture thereofSANT SANKET P·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →