Inventor · disambiguated record
Katsuhiro Sasada
Also filed as: SASADA KATSUHIRO
25 granted patents·3 pending applications·269 citations·filing 1995–2015
96Inventor score
Files withHITACHI HIGH TECH CORP16HITACHI LTD2MATSUSHITA ELECTRIC WORKS LTD2OJIMA YUUKI2HITACHI SCIENCE SYSTEMS LTD1
Top patents by PatentIndex Score
28 records- 0192US7187345B2Image forming method and charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2005·Granted Mar 6, 2007·14 cites·6 claims
- 0291US5598002AElectron beam apparatusHITACHI LTD·Filed 1996·Granted Jan 28, 1997·68 cites·11 claims
- 0389US10184790B2Pattern measurement method and pattern measurement deviceHITACHI HIGH TECH CORP·Filed 2015·Granted Jan 22, 2019·6 cites·12 claims
- 0489US7817105B2Image forming method and charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2007·Granted Oct 19, 2010·9 cites·19 claims
- 0583US7745782B2Electrostatic charge measurement method, focus adjustment method, and scanning electron microscopeHITACHI HIGH TECH CORP·Filed 2008·Granted Jun 29, 2010·7 cites·10 claims
- 0680US7247864B2Charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2005·Granted Jul 24, 2007·6 cites·5 claims
- 0779US7205541B1Charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2005·Granted Apr 17, 2007·4 cites·8 claims
- 0879US7053371B2Scanning electron microscope with measurement functionHITACHI SCIENCE SYSTEMS LTD·Filed 2004·Granted May 30, 2006·13 cites·5 claims
- 0978US9671223B2Pattern dimension measurement method using electron microscope, pattern dimension measurement system, and method for monitoring changes in electron microscope equipment over timeSHISHIDO CHIE·Filed 2011·Granted Jun 6, 2017·4 cites·8 claims
- 1077US7435958B2Electron beam apparatus and method for production of its specimen chamberHITACHI HIGH TECH CORP·Filed 2006·Granted Oct 14, 2008·3 cites·3 claims
- 1176US7601974B2Charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2007·Granted Oct 13, 2009·3 cites·13 claims
- 1273US5692061AMethod of utilizing a two-dimensional image for detecting the position, posture, and shape of a three-dimensional objectiveMATSUSHITA ELECTRIC WORKS LTD·Filed 1995·Granted Nov 25, 1997·50 cites·8 claims
- 1373US5614713AScanning electron microscopeHITACHI LTD·Filed 1996·Granted Mar 25, 1997·26 cites·10 claims
- 1472US7626166B2Electron microscopeHITACHI HIGH TECH CORP·Filed 2008·Granted Dec 1, 2009·2 cites·6 claims
- 1570US7030376B2Electron beam apparatus and method for production of its specimen chamberHITACHI HIGH TECH CORP·Filed 2003·Granted Apr 18, 2006·6 cites·2 claims
- 1668US8188427B2Scanning electron microscope alignment method and scanning electron microscopeKAKUTA JUNICHI·Filed 2008·Granted May 29, 2012·3 cites·10 claims
- 1768US5867592AMethod of utilizing edge images of a circular surface for detecting the position, posture, and shape of a three-dimensional objective having the circular surface partMATSUSHITA ELECTRIC WORKS LTD·Filed 1997·Granted Feb 2, 1999·41 cites·14 claims
- 1865US8362426B2Scanning electron microscope and image signal processing methodHITACHI HIGH TECH CORP·Filed 2006·Granted Jan 29, 2013·1 cites·12 claims
- 1965US8071961B2Charged particle beam apparatusMITO HIROAKI·Filed 2007·Granted Dec 6, 2011·2 cites·4 claims
- 2063US7514683B2Scanning electron microscopeHITACHI HIGH TECH CORP·Filed 2007·Granted Apr 7, 2009·1 cites·3 claims
- 2159US7566892B2Electron beam apparatus and method for production of its specimen chamberHITACHI HIGH TECH CORP·Filed 2007·Granted Jul 28, 2009·0 cites·9 claims
- 2255US7205550B2Electron beam apparatus and method for production of its specimen chamberHITACHI HIGH TECH CORP·Filed 2006·Granted Apr 17, 2007·0 cites·4 claims
- 2355US2008109755A1Scanning electron microscope with measurement functionOJIMA YUUKI·Filed 2007·Application pending·0 cites
- 2451US2006219917A1Scanning electron microscope with measurement functionOJIMA YUUKI·Filed 2006·Application pending·0 cites
- 2547US8203504B2Image forming method and charged particle beam apparatusKOBARU ATSUSHI·Filed 2010·Granted Jun 19, 2012·0 cites·12 claims
- 2646US8178836B2Electrostatic charge measurement method, focus adjustment method, and scanning electron microscopeISHIJIMA TATSUAKI·Filed 2010·Granted May 15, 2012·0 cites·14 claims
- 2745US10393509B2Pattern height measurement device and charged particle beam deviceHITACHI HIGH TECH CORP·Filed 2014·Granted Aug 27, 2019·0 cites·13 claims
- 2842US2015235804A1Charged Particle Microscope System and Measurement Method Using SameHITACHI HIGH TECH CORP·Filed 2013·Application pending·0 cites
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