Scanning electron microscope with measurement function

Abstract

A scanning electron microscope which efficiently makes measurements for plural measurement items at a time and allows easy entry, confirmation and revision of auto measurement parameters. Parameters for creation of a line profile from an image captured by the scanning electron microscope are entered as auto measurement parameters (AMP) to be used as common conditions for all measurement items. Also, plural combinations of edge detection methods and measurement calculation methods are entered as auto measurement parameters to make measurements for plural items.

1 . A scanning electron microscope with a measurement function, wherein: 
 plural measurement items including plural measurement calculation methods for an edge detected by an edge detection are specified in an auto measurement parameter (AMP) confirmation window;    a line profile is created from an SEM image;    an edge is detected from the line profile as specified; and    measurements are calculated successively from the detected edge according to specified plural measurement calculation methods.    
   
   
       2 - 7 . (canceled)