Scanning electron microscope with measurement function

Abstract

A scanning electron microscope which efficiently makes measurements for plural measurement items at a time and allows easy entry, confirmation and revision of auto measurement parameters. Parameters for creation of a line profile from an image captured by the scanning electron microscope are entered as auto measurement parameters (AMP) to be used as common conditions for all measurement items. Also, plural combinations of edge detection methods and measurement calculation methods are entered as auto measurement parameters to make measurements for plural items.

1 . A computer comprising a display unit for displaying a setting screen for setting a condition for the measurement of the size of a pattern formed on a sample based on a line profile that is formed on the basis of electrons emitted upon irradiation of the sample with an electron beam, wherein, 
 the setting screen displays a first setting area for setting a condition for the formation of the line profile, which condition is common to a plurality of measurement objects, and a second setting area in which a plurality of measurable objects can be set on the basis of a line profile formed on the basis of the condition that is set.    
   
   
       2 . The computer according to  claim 1 , wherein the display unit displays a setting screen for setting a method of measurement of an object set in the second setting area.  
   
   
       3 . The computer according to  claim 1 , wherein the condition set in the first setting area concerns the type of the pattern.  
   
   
       4 . The computer according to  claim 3 , wherein the condition set in the first setting area concerns at least one of: the direction of measurement of length; the area of creation of a line profile; the area of edge detection of the pattern; the number of line profiles created; the area of integration of signals per line profile when creating a line profile; the distance between box cursors for length measurement; a line profile smoothing condition; and a line profile differentiation condition.  
   
   
       5 . A computer comprising a display unit for displaying a setting screen for setting a condition for the measurement of the size of a pattern formed on a sample based on a line profile that is formed on the basis of electrons emitted upon irradiation of the sample with an electron beam wherein, 
 the setting screen displays a setting area for setting a condition for the formation of the line profile, which condition is common to a plurality of measurement objects, and an area for displaying a plurality of measurable objects based on a line profile formed on the basis of the condition that is set.