Inventor · disambiguated record
Thomas K. Crosby
Also filed as: CROSBY THOMAS K
3 granted patents·127 citations·filing 1996–1999
76Inventor score
Technology areasB24B
Top patents by PatentIndex Score
3 records- 0180US5989104AWorkpiece carrier with monopiece pressure plate and low gimbal pointSPEEDFAM IPEC CORP·Filed 1998·Granted Nov 23, 1999·54 cites·10 claims
- 0270US6095900AMethod for manufacturing a workpiece carrier backing pad and pressure plate for polishing semiconductor wafersSPEEDFAM IPEC·Filed 1999·Granted Aug 1, 2000·35 cites·6 claims
- 0369US5842912AApparatus for conditioning polishing pads utilizing brazed diamond technologySPEEDFAM CORP·Filed 1996·Granted Dec 1, 1998·38 cites·7 claims
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