Inventor · disambiguated record
Kazuya Nabeta
Also filed as: NABETA KAZUYA
3 granted patents·4 pending applications·2 citations·filing 2010–2024
51Inventor score
Technology areasH10P
Top patents by PatentIndex Score
7 records- 0156US9305820B2Substrate processing apparatus and method of manufacturing semiconductor deviceNABETA KAZUYA·Filed 2010·Granted Apr 5, 2016·2 cites·7 claims
- 0256US2024242983A1Substrate processing apparatus, substrate processing method, method of manufacturing semiconductor device and non-transitory computer-readable recording mediumKOKUSAI ELECTRIC CORP·Filed 2023·Application pending·0 cites
- 0355US2024249960A1Substrate processing apparatus, substrate processing method, method of manufacturing semiconductor device and non-transitory computer-readable recording mediumKOKUSAI ELECTRIC CORP·Filed 2024·Application pending·0 cites
- 0452US2025006512A1Substrate processing apparatus, substrate processing method, method of manufacturing semiconductor device and non-transitory computer-readable recording mediumKOKUSAI ELECTRIC CORP·Filed 2024·Application pending·0 cites
- 0541US2021092798A1Substrate Processing Apparatus and Gas BoxKOKUSAI ELECTRIC CORP·Filed 2020·Application pending·0 cites
- 0639US10755962B2Substrate processing apparatus and method of manufacturing semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2016·Granted Aug 25, 2020·0 cites·8 claims
- 0733US9842754B2Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording mediumHITACHI INT ELECTRIC INC·Filed 2015·Granted Dec 12, 2017·0 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →