Inventor · disambiguated record
Katsuya Toba
Also filed as: TOBA KATSUYA
3 granted patents·1 pending application·15 citations·filing 2003–2012
62Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0166US6957956B2Vertical heat treating equipmentTOKYO ELECTRON LTD·Filed 2003·Granted Oct 25, 2005·12 cites·15 claims
- 0257US8940096B2Vertical thermal processing apparatus and substrate supporterASARI SATOSHI·Filed 2009·Granted Jan 27, 2015·2 cites·10 claims
- 0349US9230843B2Loading unit and processing systemTOBA KATSUYA·Filed 2012·Granted Jan 5, 2016·1 cites·9 claims
- 0436US2012258414A1Substrate support instrument, and vertical heat treatment apparatus and driving method thereofMATSUURA HIROYUKI·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →