Assignee
MATSUURA HIROYUKI
JP·6 granted patents·5 pending applications·59 citations·filing 2004–2012
Top patents by PatentIndex Score
11 records- 0196US9208954B2Electrolytic capacitorMATSUURA HIROYUKI·Filed 2011·Granted Dec 8, 2015·17 cites·14 claims
- 0293US8336490B2Plasma processing apparatusMATSUURA HIROYUKI·Filed 2011·Granted Dec 25, 2012·7 cites·17 claims
- 0390US8394200B2Vertical plasma processing apparatus for semiconductor processMATSUURA HIROYUKI·Filed 2008·Granted Mar 12, 2013·10 cites·18 claims
- 0484US8646407B2Film formation apparatus for semiconductor process and method for using the sameMATSUURA HIROYUKI·Filed 2012·Granted Feb 11, 2014·2 cites·10 claims
- 0578USD652148SContainerMATSUURA HIROYUKI·Filed 2011·Granted Jan 10, 2012·23 cites·1 claims
- 0660US2007240644A1Vertical plasma processing apparatus for semiconductor processMATSUURA HIROYUKI·Filed 2007·Application pending·0 cites
- 0744US9105672B2Heat treatment apparatusMATSUURA HIROYUKI·Filed 2012·Granted Aug 11, 2015·0 cites·6 claims
- 0843US2005287806A1Vertical CVD apparatus and CVD method using the sameMATSUURA HIROYUKI·Filed 2004·Application pending·0 cites
- 0940US2012249992A1Substrate transfer apparatus and substrate transfer methodMATSUURA HIROYUKI·Filed 2012·Application pending·0 cites
- 1040US2012251967A1Loading unit and processing systemMATSUURA HIROYUKI·Filed 2012·Application pending·0 cites
- 1136US2012258414A1Substrate support instrument, and vertical heat treatment apparatus and driving method thereofMATSUURA HIROYUKI·Filed 2012·Application pending·0 cites
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