Inventor · disambiguated record
Anatoly Romanovsky
Also filed as: ROMANOVSKY ANATOLY · ROMANOVSKY ANATOLY G
28 granted patents·453 citations·filing 1985–2021
96Inventor score
Top patents by PatentIndex Score
28 records- 0196US9891177B2TDI sensor in a darkfield systemKLA TENCOR CORP·Filed 2014·Granted Feb 13, 2018·56 cites·41 claims
- 0294US9279774B2Wafer inspectionROMANOVSKY ANATOLY·Filed 2012·Granted Mar 8, 2016·29 cites·19 claims
- 0393US7773212B1Contemporaneous surface and edge inspectionKLA TENCOR CORP·Filed 2008·Granted Aug 10, 2010·24 cites·9 claims
- 0491US8294887B1Fast laser power control with improved reliability for surface inspectionBIELLAK STEPHEN·Filed 2010·Granted Oct 23, 2012·11 cites·19 claims
- 0591US7436508B2Systems, circuits and methods for reducing thermal damage and extending the detection range of an inspection systemKLA TENCOR TECH CORP·Filed 2005·Granted Oct 14, 2008·16 cites·19 claims
- 0691US4604724AAutomated apparatus for handling elongated well elements such as pipesGOMELSKOE SP KT BJURO SEISMICH·Filed 1985·Granted Aug 5, 1986·266 cites·2 claims
- 0790US10488348B2Wafer inspectionKLA TENCOR CORP·Filed 2018·Granted Nov 26, 2019·3 cites·57 claims
- 0887US10324045B2Surface defect inspection with large particle monitoring and laser power controlKLA TENCOR CORP·Filed 2016·Granted Jun 18, 2019·4 cites·20 claims
- 0984US8432944B2Extending the lifetime of a deep UV laser in a wafer inspection toolROMANOVSKY ANATOLY·Filed 2011·Granted Apr 30, 2013·8 cites·8 claims
- 1083US7414715B2Systems, circuits and methods for extending the detection range of an inspection system by avoiding detector saturationKLA TENCOR TECH CORP·Filed 2005·Granted Aug 19, 2008·8 cites·10 claims
- 1181US9841512B2System and method for reducing radiation-induced false counts in an inspection systemKLA TENCOR CORP·Filed 2015·Granted Dec 12, 2017·2 cites·32 claims
- 1281US7671982B2Systems, circuits and methods for reducing thermal damage and extending the detection range of an inspection systemKLA TENCOR TECH CORP·Filed 2008·Granted Mar 2, 2010·6 cites·14 claims
- 1379US10215712B2Method and apparatus for producing and measuring dynamically focused, steered, and shaped oblique laser illumination for spinning wafer inspection systemWOLTERS CHRISTIAN·Filed 2014·Granted Feb 26, 2019·3 cites·9 claims
- 1479US7777875B2Systems, circuits and methods for extending the detection range of an inspection system by avoiding detector saturationKLA TENCOR TECH CORP·Filed 2008·Granted Aug 17, 2010·4 cites·9 claims
- 1577US8134698B1Dynamic range extension in surface inspection systemsWOLTERS CHRISTIAN·Filed 2008·Granted Mar 13, 2012·6 cites·26 claims
- 1670US9068952B2Method and apparatus for producing and measuring dynamically focussed, steered, and shaped oblique laser illumination for spinning wafer inspection systemPETRENKO ALEKSEY·Filed 2009·Granted Jun 30, 2015·4 cites·9 claims
- 1766US9091666B2Extended defect sizing range for wafer inspectionCAI ZHONGPING·Filed 2012·Granted Jul 28, 2015·2 cites·21 claims
- 1864US7423250B2Systems, circuits and methods for extending the detection range of an inspection system by avoiding circuit saturationKLA TENCOR TECH CORP·Filed 2005·Granted Sep 9, 2008·1 cites·26 claims
- 1960US9915622B2Wafer inspectionKLA TENCOR CORP·Filed 2015·Granted Mar 13, 2018·0 cites·20 claims
- 2059US10241217B2System and method for reducing radiation-induced false counts in an inspection systemKLA TENCOR CORP·Filed 2017·Granted Mar 26, 2019·0 cites·21 claims
- 2156US11374375B2Laser closed power loop with an acousto-optic modulator for power modulationKLA CORP·Filed 2020·Granted Jun 28, 2022·0 cites·25 claims
- 2252US11733172B2Apparatus and method for rotating an optical objectiveKLA CORP·Filed 2021·Granted Aug 22, 2023·0 cites·38 claims
- 2351US12345658B2Large-particle monitoring with laser power control for defect inspectionKLA CORP·Filed 2021·Granted Jul 1, 2025·0 cites·32 claims
- 2451US9678350B2Laser with integrated multi line or scanning beam capabilityKLA TENCOR CORP·Filed 2013·Granted Jun 13, 2017·0 cites·20 claims
- 2548US7746462B2Inspection systems and methods for extending the detection range of an inspection system by forcing the photodetector into the non-linear rangeKLA TENCOR TECH CORP·Filed 2007·Granted Jun 29, 2010·0 cites·25 claims
- 2646US9587936B2Scanning inspection system with angular correctionKLA TENCOR CORP·Filed 2013·Granted Mar 7, 2017·0 cites·21 claims
- 2743US8934091B2Monitoring incident beam position in a wafer inspection systemKLA TENCOR CORP·Filed 2013·Granted Jan 13, 2015·0 cites·22 claims
- 2842US9810619B2Method and system for simultaneous tilt and height control of a substrate surface in an inspection systemKLA TENCOR CORP·Filed 2013·Granted Nov 7, 2017·0 cites·45 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →