Inventor · disambiguated record
Kevin A. Papke
Also filed as: PAPKE KEVIN · PAPKE KEVIN A
12 granted patents·8 pending applications·21 citations·filing 2011–2023
85Inventor score
Top patents by PatentIndex Score
20 records- 0196US9914999B2Oxidized showerhead and process kit parts and methods of using sameAPPLIED MATERIALS INC·Filed 2015·Granted Mar 13, 2018·10 cites·18 claims
- 0289US10583465B230 nm in-line LPC testing and cleaning of semiconductor processing equipmentAPPLIED MATERIALS INC·Filed 2017·Granted Mar 10, 2020·4 cites·9 claims
- 0385US10941303B2Chemical conversion of yttria into yttrium fluoride and yttrium oxyfluoride to develop pre-seasoned corossion resistive coating for plasma componentsAPPLIED MATERIALS INC·Filed 2017·Granted Mar 9, 2021·4 cites·20 claims
- 0475US10921251B2Chamber component part wear indicator and a system for detecting part wearAPPLIED MATERIALS INC·Filed 2016·Granted Feb 16, 2021·1 cites·7 claims
- 0569US11047035B2Protective yttria coating for semiconductor equipment partsAPPLIED MATERIALS INC·Filed 2019·Granted Jun 29, 2021·1 cites·19 claims
- 0668US10233554B2Aluminum electroplating and oxide formation as barrier layer for aluminum semiconductor process equipmentAPPLIED MATERIALS INC·Filed 2017·Granted Mar 19, 2019·1 cites·19 claims
- 0760US2023167543A1Method for fabricating chamber partsAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 0859US11118263B2Method for forming a protective coating film for halide plasma resistanceAPPLIED MATERIALS INC·Filed 2019·Granted Sep 14, 2021·0 cites·7 claims
- 0956US11591689B2Method for fabricating chamber partsAPPLIED MATERIALS INC·Filed 2020·Granted Feb 28, 2023·0 cites·9 claims
- 1055US11239058B2Protective layers for processing chamber componentsAPPLIED MATERIALS INC·Filed 2019·Granted Feb 1, 2022·0 cites·20 claims
- 1154US10253406B2Method for forming yttrium oxide on semiconductor processing equipmentAPPLIED MATERIALS INC·Filed 2017·Granted Apr 9, 2019·0 cites·19 claims
- 1247US11810766B2Protection of aluminum process chamber componentsAPPLIED MATERIALS INC·Filed 2019·Granted Nov 7, 2023·0 cites·20 claims
- 1346US10883972B2Coating tester using gas sensorsAPPLIED MATERIALS INC·Filed 2017·Granted Jan 5, 2021·0 cites·16 claims
- 1446US2016056061A1Real time liquid particle counter (lpc) end point detection systemQUANTUM GLOBAL TECH LLC·Filed 2015·Application pending·0 cites
- 1545US2012216833A1Real time liquid particle counter (lpc) end point detection systemWANG JIANSHENG·Filed 2011·Application pending·0 cites
- 1644US2022277936A1Protective multilayer coating for processing chamber componentsAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 1738US2019070639A1Automatic cleaning machine for cleaning process kitsAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
- 1838US2017056935A1Method for removing aluminum fluoride contamination from semiconductor processing equipmentAPPLIED MATERIALS INC·Filed 2015·Application pending·0 cites
- 1936US2018061617A1Method to deposit aluminum oxy-fluoride layer for fast recovery of etch amount in etch chamberAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
- 2035US2018330929A1In-situ removal of accumulated process byproducts from components of a semiconductor processing chamberAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →