Inventor · disambiguated record
Glen Egami
Also filed as: EGAMI GLEN · EGAMI GLEN ERIC
2 granted patents·8 pending applications·5 citations·filing 2007–2012
49Inventor score
Technology areasH10P
Top patents by PatentIndex Score
10 records- 0172US9177849B2Chuck for mounting a semiconductor wafer for liquid immersion processingINTERMOLECULAR INC·Filed 2012·Granted Nov 3, 2015·3 cites·12 claims
- 0259US9016289B2System and method for reducing particles and marks on wafer surface following reactor processingKAHLON SATBIR·Filed 2011·Granted Apr 28, 2015·2 cites·17 claims
- 0347US2007181149A1Single wafer backside wet cleanKO ALEXANDER S·Filed 2007·Application pending·0 cites
- 0437US2008268651A1Catch-cup to diverter alignment leveling jigCHILD KENT RILEY·Filed 2007·Application pending·0 cites
- 0537US2009014323A1High temperature cathode for plasma etchingYENDLER BORIS·Filed 2008·Application pending·0 cites
- 0633US2013025688A1No-Contact Wet Processing Tool with Fluid BarrierINTERMOLECULAR INC·Filed 2011·Application pending·0 cites
- 0732US2011049779A1Substrate carrier design for improved photoluminescence uniformityAPPLIED MATERIALS INC·Filed 2010·Application pending·0 cites
- 0829US2012148760A1Induction Heating for Substrate ProcessingEGAMI GLEN ERIC·Filed 2010·Application pending·0 cites
- 0928US2013025690A1No-Contact Wet Processing Tool with Liquid BarrierINTERMOLECULAR INC·Filed 2011·Application pending·0 cites
- 1025US2013164937A1Chemical mechanical planarization site isolation reactorEGAMI GLEN·Filed 2011·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →