Inventor · disambiguated record
Yukihiro Ushiku
Also filed as: USHIKU YUKIHIRO
45 granted patents·7 pending applications·1,041 citations·filing 1983–2009
98Inventor score
Files withTOSHIBA KK45KABUSHIK KAISHA TOSHIBA1KABUSHIKIA KAISHA TOSHIBA1SAKI KAZUO1TOKYO SHIBAURA ELECTRIC CO1
Top patents by PatentIndex Score
52 records- 0193US5844278ASemiconductor device having a projecting element regionTOSHIBA KK·Filed 1995·Granted Dec 1, 1998·170 cites·16 claims
- 0292US7221991B2System and method for monitoring manufacturing apparatusesTOSHIBA KK·Filed 2005·Granted May 22, 2007·24 cites·9 claims
- 0390US5763953ASemiconductor device and method of manufacturing the sameTOSHIBA KK·Filed 1996·Granted Jun 9, 1998·85 cites·5 claims
- 0489US7324855B2Process-state management system, management server and control server adapted for the system, method for managing process-states, method for manufacturing a product, and computer program product for the management serverTOSHIBA KK·Filed 2005·Granted Jan 29, 2008·24 cites·20 claims
- 0587US5032890ASemiconductor integrated circuit with dummy patternsTOSHIBA KK·Filed 1989·Granted Jul 16, 1991·75 cites·5 claims
- 0685US7057259B2Semiconductor wafer with ID mark, equipment for and method of manufacturing semiconductor device from themTOSHIBA KK·Filed 2002·Granted Jun 6, 2006·35 cites·38 claims
- 0785US6885950B2Method, apparatus, and computer program of searching for clustering faults in semiconductor device manufacturingTOSHIBA KK·Filed 2001·Granted Apr 26, 2005·32 cites·15 claims
- 0884US7588973B2Semiconductor device and method of manufacturing the sameTOSHIBA KK·Filed 2005·Granted Sep 15, 2009·10 cites·3 claims
- 0984US5529954AMethod of diffusing a metal through a silver electrode to form a protective film on the surface of the electrodeTOSHIBA KK·Filed 1995·Granted Jun 25, 1996·58 cites·5 claims
- 1082US7702413B2Semiconductor device manufacturing system and method for manufacturing semiconductor devices including calculating oxide film thickness using real time simulatorTOSHIBA KK·Filed 2004·Granted Apr 20, 2010·22 cites·17 claims
- 1182US6865513B2Method for predicting life of rotary machine and determining repair timing of rotary machineTOSHIBA KK·Filed 2002·Granted Mar 8, 2005·18 cites·18 claims
- 1281US7463941B2Quality control system, quality control method, and method of lot-to-lot wafer processingTOSHIBA KK·Filed 2006·Granted Dec 9, 2008·8 cites·20 claims
- 1378US6909993B2Method for diagnosing failure of a manufacturing apparatus and a failure diagnosis systemTOSHIBA KK·Filed 2002·Granted Jun 21, 2005·20 cites·17 claims
- 1478US6885972B2Method for predicting life span of rotary machine used in manufacturing apparatus and life predicting systemTOSHIBA KK·Filed 2002·Granted Apr 26, 2005·21 cites·8 claims
- 1578US6782348B2Apparatus for diagnosing failure in equipment using signals relating to the equipmentTOSHIBA KK·Filed 2002·Granted Aug 24, 2004·21 cites·30 claims
- 1678US5675176ASemiconductor device and a method for manufacturing the sameTOSHIBA KK·Filed 1995·Granted Oct 7, 1997·43 cites·21 claims
- 1777US7700381B2Semiconductor wafer with ID mark, equipment for and method of manufacturing semiconductor device from themKABUSHIKIA KAISHA TOSHIBA·Filed 2006·Granted Apr 20, 2010·9 cites·1 claims
- 1875US6937963B2Method for avoiding irregular shutoff of production equipment and system for avoiding irregular shutoffTOSHIBA KK·Filed 2002·Granted Aug 30, 2005·18 cites·20 claims
- 1975US6766275B2Method for diagnosing life of manufacturing equipment using rotary machineTOSHIBA KK·Filed 2002·Granted Jul 20, 2004·17 cites·23 claims
- 2073US6724045B1Semiconductor device and method of manufacturing the sameTOSHIBA KK·Filed 2000·Granted Apr 20, 2004·15 cites·7 claims
- 2172US6944572B2Apparatus for predicting life of rotary machine and equipment using the sameTOSHIBA KK·Filed 2004·Granted Sep 13, 2005·15 cites·22 claims
- 2271US7831330B2Process control system, process control method, and method of manufacturing electronic apparatusTOSHIBA KK·Filed 2009·Granted Nov 9, 2010·2 cites·10 claims
- 2371US6184083B1Semiconductor device and method of manufacturing the sameTOSHIBA KK·Filed 1998·Granted Feb 6, 2001·35 cites·23 claims
- 2469US5898203ASemiconductor device having solid phase diffusion sourcesTOSHIBA KK·Filed 1997·Granted Apr 27, 1999·29 cites·5 claims
- 2569US5434440ASemiconductor device and method of manufacturing the sameTOSHIBA KK·Filed 1993·Granted Jul 18, 1995·35 cites·1 claims
- 2665US7188049B2System and method for controlling manufacturing processes, and method for manufacturing a semiconductor deviceTOSHIBA KK·Filed 2005·Granted Mar 6, 2007·2 cites·20 claims
- 2764US7314766B2Semiconductor wafer treatment method, semiconductor wafer inspection method, semiconductor device development method and semiconductor wafer treatment apparatusTOSHIBA KK·Filed 2003·Granted Jan 1, 2008·9 cites·23 claims
- 2864US7222026B2Equipment for and method of detecting faults in semiconductor integrated circuitsTOSHIBA KK·Filed 2002·Granted May 22, 2007·10 cites·6 claims
- 2962US7065469B2Manufacturing apparatus and method for predicting life of a manufacturing apparatus which uses a rotary machineTOSHIBA KK·Filed 2003·Granted Jun 20, 2006·9 cites·16 claims
- 3060US7413914B2Method and apparatus for manufacturing semiconductor device, method and apparatus for controlling the same, and method and apparatus for simulating manufacturing process of semiconductor deviceTOSHIBA KK·Filed 2002·Granted Aug 19, 2008·7 cites·53 claims
- 3159US7596421B2Process control system, process control method, and method of manufacturing electronic apparatusKABUSHIK KAISHA TOSHIBA·Filed 2006·Granted Sep 29, 2009·2 cites·11 claims
- 3259US7082346B2Semiconductor manufacturing apparatus and semiconductor device manufacturing methodTOSHIBA KK·Filed 2003·Granted Jul 25, 2006·6 cites·16 claims
- 3358US5903027AMOSFET with solid phase diffusion sourceTOSHIBA KK·Filed 1997·Granted May 11, 1999·20 cites·9 claims
- 3457US7529634B2Method, apparatus, and computer program of searching for clustering faults in semiconductor device manufacturingTOSHIBA KK·Filed 2004·Granted May 5, 2009·5 cites·3 claims
- 3557US7361960B1Semiconductor device and method of manufacturing the sameTOSHIBA KK·Filed 2000·Granted Apr 22, 2008·6 cites·7 claims
- 3657US6898551B2System for predicting life of a rotary machine, method for predicting life of a manufacturing apparatus which uses a rotary machine and a manufacturing apparatusTOSHIBA KK·Filed 2003·Granted May 24, 2005·6 cites·12 claims
- 3757US4661721AClock driver distribution system in a semiconductor integrated circuit deviceTOSHIBA KK·Filed 1985·Granted Apr 28, 1987·22 cites·1 claims
- 3854US6930359B2Semiconductor device and method of manufacturing the sameTOSHIBA KK·Filed 2004·Granted Aug 16, 2005·4 cites·4 claims
- 3954US5028552AMethod of manufacturing insulated-gate type field effect transistorTOSHIBA KK·Filed 1989·Granted Jul 2, 1991·20 cites·4 claims
- 4053US5185279AMethod of manufacturing insulated-gate type field effect transistorTOSHIBA KK·Filed 1991·Granted Feb 9, 1993·23 cites·3 claims
- 4150US5739575ADielectrically isolated substrate and method for manufacturing the sameTOSHIBA KK·Filed 1996·Granted Apr 14, 1998·16 cites·13 claims
- 4250US5698881AMOSFET with solid phase diffusion sourceTOSHIBA KK·Filed 1994·Granted Dec 16, 1997·17 cites·5 claims
- 4349US4587549AMultilayer interconnection structure for semiconductor deviceTOKYO SHIBAURA ELECTRIC CO·Filed 1983·Granted May 6, 1986·13 cites·2 claims
- 4448US2005260081A1Vacuum pumping system and method for monitoring of the sameTOSHIBA KK·Filed 2005·Application pending·0 cites
- 4548US2006217830A1Semiconductor manufacturing apparatus and semiconductor device manufacturing methodSAKI KAZUO·Filed 2006·Application pending·0 cites
- 4644US7531462B2Method of inspecting semiconductor waferTOSHIBA KK·Filed 2006·Granted May 12, 2009·0 cites·14 claims
- 4742US2005107984A1Manufacturing apparatus and method for predicting life of rotary machine used in the sameTOSHIBA KK·Filed 2004·Application pending·0 cites
- 4841US2005284575A1Processing system and operating method of processing systemTOSHIBA KK·Filed 2005·Application pending·0 cites
- 4941US2003041802A1Vacuum pumping system and method for monitoring of the sameTOSHIBA KK·Filed 2002·Application pending·0 cites
- 5040US2006085165A1Method for determining a failure of a manufacturing condition, system for determining a failure of a manufacuring condition and method for manufacturing an industrial productUSHIKU YUKIHIRO·Filed 2005·Application pending·0 cites
Showing the top 50 of 52 patent records by PatentIndex Score.
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