Vacuum pumping system and method for monitoring of the same

Abstract

A vacuum pumping system includes: an evacuation conduit, having a sequence of monitoring zones serially assigned in an exhaust direction; sensors respectively provided to the monitoring zones and independently detecting the conditions of the monitoring zones; heaters respectively provided to the monitoring zones and being paired with the sensors; and a control unit receiving data signals from the sensors, comparing the data signals with a threshold value, and when the data signals from a specific sensor exceed the threshold value, selectively supplying heating power to a heater of the monitoring zone where the specific sensor is provided.

1 - 10 . (canceled)  
   
   
       11 . A method for monitoring an evacuation conduit comprising: 
 evacuating a reactive gas and a reaction by-product of the reactive gas by the evacuation conduit having a plurality of monitoring zones serially arranged in an evacuation direction;    independently detecting respective conditions of the monitoring zones by sensors provided respectively to the monitoring zones;    receiving respective data signals from the sensors;    comparing the data signals with a threshold value; and    selectively supplying heating power to only a heater of the monitoring zone where the specified sensor is arranged, when the data signals from a specific sensor exceeds the threshold value.    
   
   
       12 . The method of  claim 11 , wherein one of the respective conditions is a vibration.  
   
   
       13 . The method of  claim 11 , wherein one of the respective conditions is a temperature.  
   
   
       14 . A method for monitoring an evacuation conduit comprising: 
 evacuating a reactive gas and a reaction by-product of the reactive gas, by the evacuation conduit, including a first valve connected to a suction side piping of a specific evacuation element, a branching vacuum piping having an exhaust side piping connected to the first valve, a second valve connected to other exhaust side piping of the branching vacuum piping, a bypass piping having a suction side piping connected to the second valve;    detecting a condition of the specific evacuation element by sensors connected to at least one of the suction side piping of the specific evacuation element, the exhaust side piping of the specific evacuation element, and the main body of the specific evacuation element; and    receiving data signals from the sensors, comparing the data signals with a threshold value, and when the data signals from a specific sensor exceeds the threshold value, supplying respectively signals for closing the first valve and opening the second valve to the first and second valves.    
   
   
       15 . The method of  claim 14 , wherein one of the respective conditions is a vibration.  
   
   
       16 . The method of  claim 14 , wherein one of the respective conditions is a temperature.  
   
   
       17 . The method of  claim 14 , further comprising a spare evacuation element in-between the second valve and the bypass piping, and a third and fourth valve, which are respectively connected to exhaust piping of the bypass piping and the specific evacuation element.  
   
   
       18 . The method of  claim 17 , wherein one of the respective conditions is a vibration.  
   
   
       19 . The method of  claim 17 , wherein one of the respective conditions is a temperature.