Inventor · disambiguated record
Takehiko Mayama
Also filed as: MAYAMA TAKEHIKO
12 granted patents·4 pending applications·468 citations·filing 1995–2009
94Inventor score
Files withCANON KK16
Top patents by PatentIndex Score
16 records- 0194US7275627B1Active vibration suppression apparatus, control method therefor, and exposure apparatus having active vibration suppression apparatusCANON KK·Filed 2005·Granted Oct 2, 2007·21 cites·11 claims
- 0294US6322060B1Anti-vibration apparatus, exposure apparatus using the same, device manufacturing method, and anti-vibration methodCANON KK·Filed 1999·Granted Nov 27, 2001·81 cites·44 claims
- 0394US6170622B1Anti-vibration apparatus and anti-vibration method thereofCANON KK·Filed 1998·Granted Jan 9, 2001·83 cites·46 claims
- 0493US6021991AActive anti-vibration apparatusCANON KK·Filed 1998·Granted Feb 8, 2000·74 cites·15 claims
- 0589US6473159B1Anti-vibration system in exposure apparatusCANON KK·Filed 2000·Granted Oct 29, 2002·38 cites·24 claims
- 0685US7063192B2Active vibration suppression apparatus, control method therefor, and exposure apparatus having active vibration suppression apparatusCANON KK·Filed 2001·Granted Jun 20, 2006·24 cites·10 claims
- 0783US7686144B2Vibration isolation device, arithmetic apparatus, exposure apparatus, and device manufacturing methodCANON KK·Filed 2008·Granted Mar 30, 2010·9 cites·9 claims
- 0878US5812958AAnti-vibration systemCANON KK·Filed 1995·Granted Sep 22, 1998·37 cites·5 claims
- 0977US7072777B1Exposure apparatus anti-vibration apparatus, system identification apparatus and system identification methodCANON KK·Filed 1999·Granted Jul 4, 2006·33 cites·10 claims
- 1077US6518721B2Oscillation isolatorCANON KK·Filed 2001·Granted Feb 11, 2003·16 cites·10 claims
- 1170US6128552AAnti-vibration apparatus and methodCANON KK·Filed 1997·Granted Oct 3, 2000·27 cites·7 claims
- 1260US6155542AVibration damping apparatus and methodCANON KK·Filed 1996·Granted Dec 5, 2000·25 cites·5 claims
- 1356US2010004869A1Vibration Isolation Device, Arithmetic Apparatus, Exposure Apparatus, and Device Manufacturing MethodCANON KK·Filed 2009·Application pending·0 cites
- 1448US2009224444A1Vibration suppression apparatus, exposure apparatus, and method of manufacturing deviceCANON KK·Filed 2009·Application pending·0 cites
- 1546US2008218720A1Exposure apparatus and method of manufacturing deviceCANON KK·Filed 2008·Application pending·0 cites
- 1645US2006017908A1Exposure apparatus and semiconductor device manufacturing methodCANON KK·Filed 2005·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Takehiko Mayama files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →