Vibration Isolation Device, Arithmetic Apparatus, Exposure Apparatus, and Device Manufacturing Method

Abstract

An arithmetic apparatus connected to a communication net connected to a vibration isolation device. The apparatus includes a reception unit that receives seismic information via the communication net from a seismic observation device, an estimation unit that estimates seismic vibration which will arrive at the vibration isolation device, on the basis of the seismic information received by the reception unit, and a transmission unit that transmits information on the seismic vibration estimated by the estimation unit to the vibration isolation device via the communication net.

1 - 11 . (canceled) 
   
   
       12 . An arithmetic apparatus connected to a communication net connected to a vibration isolation device, said apparatus comprising:
 a reception unit configured to receive seismic information via the communication net from a seismic observation device;   an estimation unit configured to estimate seismic vibration which will arrive at the vibration isolation device, on the basis of the seismic information received by said reception unit; and   a transmission unit configured to transmit information on the seismic vibration estimated by said estimation unit to the vibration isolation device via the communication net.   
   
   
       13 . An arithmetic apparatus connected to a communication net connected to a vibration isolation device, said apparatus comprising:
 a reception unit configured to receive seismic information via the communication net from a first vibration isolation device;   an estimation unit configured to estimate seismic vibration which will arrive at a second vibration isolation device, which is different from the first vibration isolation device, on the basis of the seismic information received by said reception unit; and   a transmission unit configured to transmit information on the seismic vibration estimated by said estimation unit to the second vibration isolation device via the communication net.   
   
   
       14 . An arithmetic apparatus connected to a communication net connected to an exposure apparatus, said apparatus comprising:
 a reception unit configured to receive seismic information via the communication net from a seismic observation device;   an estimation unit configured to estimate seismic vibration, which will arrive at the exposure apparatus, on the basis of the seismic information received by said reception unit; and   a transmission unit configured to transmit information on the seismic vibration estimated by said estimation unit to the exposure apparatus via the communication net.   
   
   
       15 . An arithmetic apparatus connected to a communication net connected to an exposure apparatus, said apparatus comprising:
 a reception unit configured to receive seismic information via the communication net from a first exposure apparatus;   an estimation unit configured to estimate seismic vibration, which will arrive at a second exposure apparatus, which is different from the first exposure apparatus, on the basis of the seismic information received by said reception unit; and   a transmission unit configured to transmit information on the seismic vibration estimated by said estimation unit to the second exposure apparatus via the communication net.   
   
   
       16 . An exposure apparatus which exposes a substrate to light, said apparatus comprising:
 a vibration isolation unit configured to support a structure;   a detector configured to detect a vibration of a floor on which said vibration isolation unit is installed;   a transmission unit configured to receive estimation information regarding seismic vibration which will reach said exposure apparatus, from said external apparatus, via the communication net; and   a notification unit configured to notify an operator of the estimation information received by said transmission unit.   
   
   
       17 . An exposure apparatus which exposes a substrate to light, said apparatus comprising:
 a vibration isolation unit configured to support a structure;   a reception unit configured to receive estimation information regarding seismic vibration which will reach said exposure apparatus, from an external apparatus, which is connected to said exposure apparatus via a communication net; and   a notification unit configured to notify an operator of the estimation information received by said reception unit.