Inventor · disambiguated record
Kan Ota
Also filed as: OTA KAN
8 granted patents·120 citations·filing 2004–2016
84Inventor score
Top patents by PatentIndex Score
8 records- 0195US8227768B2Low-inertia multi-axis multi-directional mechanically scanned ion implantation systemSMICK THEODORE·Filed 2009·Granted Jul 24, 2012·80 cites·35 claims
- 0276US6987272B2Work piece transfer system for an ion beam implanterAXCELIS TECH INC·Filed 2004·Granted Jan 17, 2006·22 cites·23 claims
- 0373US9427599B1Multi-resolution detectors for measuring and controlling a charged particle pencil beamPYRAMID TECHNICAL CONSULTANTS INC·Filed 2015·Granted Aug 30, 2016·4 cites·24 claims
- 0465US7924159B2Remote wafer presence detection with passive RFIDAXCELIS TECH INC·Filed 2008·Granted Apr 12, 2011·4 cites·25 claims
- 0562US7119343B2Mechanical oscillator for wafer scan with spot beamAXCELIS TECH INC·Filed 2004·Granted Oct 10, 2006·10 cites·39 claims
- 0646US9611540B2Electrostatic chuck shielding mechanismOTA KAN·Filed 2008·Granted Apr 4, 2017·0 cites·19 claims
- 0739US8481969B2Effective algorithm for warming a twist axis for cold ion implantationsOTA KAN·Filed 2011·Granted Jul 9, 2013·0 cites·16 claims
- 0836US10183178B2Method and apparatus for controlled pencil beam therapyPYRAMID TECHNICAL CONSULTANTS INC·Filed 2016·Granted Jan 22, 2019·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →