Assignee

SMICK THEODORE

US·2 granted patents·81 citations·filing 2009–2011

Technology mixH01J2 C23C1 F16M1

Top patents by PatentIndex Score

2 records

0195US8227768B2Low-inertia multi-axis multi-directional mechanically scanned ion implantation systemSMICK THEODORE·Filed 2009·Granted Jul 24, 2012·80 cites·35 claims
0263US8633458B2Ion implant apparatus and a method of implanting ionsSMICK THEODORE·Filed 2011·Granted Jan 21, 2014·1 cites·20 claims

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