Inventor · disambiguated record
Kaiming Yang
Also filed as: YANG KAIMING
26 granted patents·5 pending applications·15 citations·filing 2008–2021
91Inventor score
Top patents by PatentIndex Score
31 records- 0173US9879979B2Heterodyne grating interferometer displacement measurement systemUNIV TSINGHUA·Filed 2013·Granted Jan 30, 2018·4 cites·9 claims
- 0269US10532832B2Magnetic levitation reaction sphereUNIV TSINGHUA·Filed 2016·Granted Jan 14, 2020·2 cites·4 claims
- 0366US8599361B2Nanometer-precision six-degree-of-freedom magnetic suspension micro-motion table and application thereofZHU YU·Filed 2011·Granted Dec 3, 2013·1 cites·3 claims
- 0466US8284380B2Dual-stage switching system for lithographic machineZHU YU·Filed 2008·Granted Oct 9, 2012·2 cites·5 claims
- 0566US8084897B2Micro stage with 6 degrees of freedomZHU YU·Filed 2008·Granted Dec 27, 2011·2 cites·1 claims
- 0663US9903704B2Three-DOF heterodyne grating interferometer displacement measurement systemUNIV TSINGHUA·Filed 2014·Granted Feb 27, 2018·2 cites·6 claims
- 0757US9885556B2Dual-frequency grating interferometer displacement measurement systemUNIV TSINGHUA·Filed 2013·Granted Feb 6, 2018·1 cites·8 claims
- 0856US9752643B2Negative stiffness system for gravity compensation of micropositionerSHANGHAI MICROELECTRONICS EQUI·Filed 2013·Granted Sep 5, 2017·1 cites·3 claims
- 0953US12169367B2Vertical motion protection method and device based on dual-stage motion system of photolithography machineUNIV TSINGHUA·Filed 2021·Granted Dec 17, 2024·0 cites·10 claims
- 1052US12346030B2Device and method for regulating and controlling incident angle of light beam in laser interference lithographyUNIV TSINGHUA·Filed 2021·Granted Jul 1, 2025·0 cites·9 claims
- 1151US12393127B2Exposure light beam phase measurement method in laser interference photolithography, and photolithography systemUNIV TSINGHUA·Filed 2020·Granted Aug 19, 2025·0 cites·10 claims
- 1248US11940349B2Plane grating calibration systemUNIV TSINGHUA·Filed 2020·Granted Mar 26, 2024·0 cites·9 claims
- 1348US9869857B2Optical grating phase modulator for laser interference photoetching systemUNIV TSINGHUA·Filed 2014·Granted Jan 16, 2018·0 cites·4 claims
- 1447US12189300B2Scanning interference lithographic systemUNIV TSINGHUA·Filed 2020·Granted Jan 7, 2025·0 cites·10 claims
- 1545US12038690B2Laser interference photolithography systemUNIV TSINGHUA·Filed 2020·Granted Jul 16, 2024·0 cites·9 claims
- 1644US10597172B2Magnetic-fluid momentum sphereUNIV TSINGHUA·Filed 2016·Granted Mar 24, 2020·0 cites·5 claims
- 1744US2015326150A1Maglev workpiece table with six degrees of freedomUNIV TSINGHUA·Filed 2013·Application pending·0 cites
- 1844US2022025972A1Seal gasket for flat plate structure and sealing structure thereofUNIV TSINGHUA·Filed 2019·Application pending·0 cites
- 1943US9791789B2Magnetically suspended coarse motion and fine motion integrated reticle stage driven by planar motorUNIV TSINGHUA·Filed 2015·Granted Oct 17, 2017·0 cites·4 claims
- 2043US9310797B2Single degree of freedom vibration isolating device of linear motor and motion control method thereofUNIV TSINGHUA·Filed 2013·Granted Apr 12, 2016·0 cites·6 claims
- 2142US9182217B2Method for measuring displacement of large-range moving platformUNIV TSINGHUA·Filed 2013·Granted Nov 10, 2015·0 cites·5 claims
- 2242US8958078B2Two-dimensional, position-sensitive sensor-based system for positioning object having six degrees of freedom in spaceZHANG MING·Filed 2012·Granted Feb 17, 2015·0 cites·2 claims
- 2342US2016138903A1Two-dof heterodyne grating interferometer displacement measurement systemUNIV TSINGHUA·Filed 2014·Application pending·0 cites
- 2441US2024319619A1Phase measurement device for laser interference photolithography system, and method for using sameUNIV TSINGHUA·Filed 2020·Application pending·0 cites
- 2541US2015311099A1Wafer Stage Having Function of Anti-CollisionSHANGHAI MICROELECTRONICS EQUI·Filed 2013·Application pending·0 cites
- 2640US9766054B2Planar motor rotor displacement measuring device and its measuring methodSHANGHAI MICROELECTRONICS EQUI·Filed 2013·Granted Sep 19, 2017·0 cites·3 claims
- 2740US9310782B2Method for measuring displacement of planar motor rotorSHANGHAI MICROELECTRONICS EQUI·Filed 2013·Granted Apr 12, 2016·0 cites·3 claims
- 2837US11022423B2Method for calibrating an error of installation of an interferometer in a multi-axis laser displacement measurement systemUNIV TSINGHUA·Filed 2018·Granted Jun 1, 2021·0 cites·2 claims
- 2934US9904183B2Coarse motion and fine motion integrated reticle stage driven by planar motorUNIV TSINGHUA·Filed 2015·Granted Feb 27, 2018·0 cites·5 claims
- 3033US9995569B2Six-degree-of-freedom displacement measurement method for exposure region on silicon wafer stageUNIV TSINGHUA·Filed 2016·Granted Jun 12, 2018·0 cites·1 claims
- 3130US9455650B2Two-dimensional locating method of motion platform based on magnetic steel arrayHU JINCHUN·Filed 2011·Granted Sep 27, 2016·0 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →