Inventor · disambiguated record
Sergey Babin
Also filed as: BABIN SERGEY · BABIN SERGEY A
8 granted patents·5 pending applications·317 citations·filing 1997–2014
89Inventor score
Top patents by PatentIndex Score
13 records- 0194US5847959AMethod and apparatus for run-time correction of proximity effects in pattern generationETEC SYSTEMS INC·Filed 1997·Granted Dec 8, 1998·177 cites·20 claims
- 0291US6720565B2Real-time prediction of and correction of proximity resist heating in raster scan particle beam lithographyAPPLIED MATERIALS INC·Filed 2001·Granted Apr 13, 2004·60 cites·20 claims
- 0378US6373071B1Real-time prediction of proximity resist heating and correction of raster scan electron beam lithographyAPPLIED MATERIALS INC·Filed 1999·Granted Apr 16, 2002·32 cites·19 claims
- 0476US6420717B1Method and apparatus for real-time correction of resist heating in lithographyAPPLIED MATERIALS INC·Filed 2000·Granted Jul 16, 2002·13 cites·8 claims
- 0562US6455863B1Apparatus and method for forming a charged particle beam of arbitrary shapeAPPLIED MATERIALS INC·Filed 1999·Granted Sep 24, 2002·16 cites·23 claims
- 0655US6326635B1Minimization of electron fogging in electron beam lithographyETEC SYSTEMS INC·Filed 1999·Granted Dec 4, 2001·12 cites·14 claims
- 0753US7786403B2Method for high-resolution processing of thin layers using electron beamsNAWO TEC GMBH·Filed 2004·Granted Aug 31, 2010·6 cites·14 claims
- 0845US9964453B2Device and method for high precision fiber-optic temperature profile measurements in long length areasOPTROMIX COMPANY·Filed 2014·Granted May 8, 2018·1 cites·11 claims
- 0945US2006238545A1High-resolution autostereoscopic display and method for displaying three-dimensional imagesBAKIN DMITRY V·Filed 2006·Application pending·0 cites
- 1044US2009108486A1Method and apparatus for smoothening rough edges of lithographic patternsBABIN SERGEY·Filed 2007·Application pending·0 cites
- 1135US2003210862A1Plana holographic multiplexer/demultiplexer utilizing photonic bandgap quasi-crystals with low intrinsic loss and flat top passbandFiled 2002·Application pending·0 cites
- 1234US2003206681A1Integrating element for optical fiber communication systems based on photonic multi-bandgap quasi-crystals having optimized transfer functionsVYOPTICS INC·Filed 2002·Application pending·0 cites
- 1334US2003206694A1Photonic multi-bandgap lightwave device and methods for manufacturing thereofVYOPTICS INC·Filed 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →