Inventor · disambiguated record
Damodar Rajaram Shanbhag
Also filed as: SHANBHAG DAMODAR · SHANBHAG DAMODAR RAJARAM
9 granted patents·2 pending applications·44 citations·filing 2017–2024
84Inventor score
Top patents by PatentIndex Score
11 records- 0196US11365479B2Ex situ coating of chamber components for semiconductor processingLAM RES CORP·Filed 2020·Granted Jun 21, 2022·8 cites·16 claims
- 0294US12227837B2Ex situ coating of chamber components for semiconductor processingLAM RES CORP·Filed 2022·Granted Feb 18, 2025·2 cites·19 claims
- 0394US10760158B2Ex situ coating of chamber components for semiconductor processingLAM RES CORP·Filed 2018·Granted Sep 1, 2020·14 cites·23 claims
- 0491US10147597B1Turbulent flow spiral multi-zone precursor vaporizerLAM RES CORP·Filed 2017·Granted Dec 4, 2018·18 cites·20 claims
- 0587US11427908B2Manifold valve for multiple precursorsLAM RES CORP·Filed 2019·Granted Aug 30, 2022·2 cites·19 claims
- 0679US12163219B2Ex situ coating of chamber components for semiconductor processingLAM RES CORP·Filed 2022·Granted Dec 10, 2024·0 cites·19 claims
- 0778US11859282B2Manifold valve for controlling multiple gasesLAM RES CORP·Filed 2022·Granted Jan 2, 2024·0 cites·16 claims
- 0863US2025093299A1Corrosion-resistant acoustic resonance sensor devices for radical species detectionAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0959US2025098541A1Acoustic resonance sensor devices for radical species detection with enhanced filtersAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1047US12272591B2Friction stir welding in semiconductor manufacturing applicationsLAM RES CORP·Filed 2020·Granted Apr 8, 2025·0 cites·34 claims
- 1142US10900124B2Substrate processing chamber with showerhead having cooled faceplateLAM RES CORP·Filed 2018·Granted Jan 26, 2021·0 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →