Inventor · disambiguated record

Yin-Shen Chu

Also filed as: CHU YIN-SHEN

4 granted patents·1 pending application·45 citations·filing 2002–2005

76Inventor score

Technology areasH10P

Files withTAIWAN SEMICONDUCTOR MFG5

Top patents by PatentIndex Score

5 records

0174US6972258B2Method for selectively controlling damascene CD biasTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Dec 6, 2005·19 cites·20 claims
0273US7820553B2Prevention of trench photoresist scumTAIWAN SEMICONDUCTOR MFG·Filed 2005·Granted Oct 26, 2010·8 cites·28 claims
0366US6777334B2Method for protecting a wafer backside from etching damageTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Aug 17, 2004·14 cites·15 claims
0451US6884728B2Method for removing polymeric residue contamination on semiconductor feature sidewallsTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Apr 26, 2005·4 cites·20 claims
0535US2004192058A1Pre-etching plasma treatment to form dual damascene with improved profileTAIWAN SEMICONDUCTOR MFG·Filed 2003·Application pending·0 cites

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →