Inventor · disambiguated record
Slawomir Czerkas
Also filed as: CZERKAS SLAWOMIR
5 granted patents·4 pending applications·22 citations·filing 2008–2025
75Inventor score
Top patents by PatentIndex Score
9 records- 0185US7826068B2Method for correcting measured values resulting from the bending of a substrateVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Nov 2, 2010·12 cites·13 claims
- 0282US10303153B2Method and computer program product for controlling the positioning of patterns on a substrate in a manufacturing processKLA TENCOR CORP·Filed 2016·Granted May 28, 2019·3 cites·23 claims
- 0366US2025271776A1Image modeling-assisted metrologyKLA CORP·Filed 2025·Application pending·0 cites
- 0459US9424636B2Method for measuring positions of structures on a mask and thereby determining mask manufacturing errorsKLA TENCOR CORP·Filed 2015·Granted Aug 23, 2016·1 cites·13 claims
- 0559US2024094639A1High-resolution evaluation of optical metrology targets for process controlKLA CORP·Filed 2022·Application pending·0 cites
- 0655US8115808B2Coordinate measuring machine and method for calibrating the coordinate measuring machineFRICKE WOLFGANG·Filed 2008·Granted Feb 14, 2012·4 cites·12 claims
- 0745US8149383B2Method for determining the systematic error in the measurement of positions of edges of structures on a substrate resulting from the substrate topologyCZERKAS SLAWOMIR·Filed 2008·Granted Apr 3, 2012·2 cites·10 claims
- 0843US2009153875A1Coordinate measuring machine with temperature adapting stationVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Application pending·0 cites
- 0931US2010302555A1Metrology system and method for monitoring and correcting system generated errorsKLA TENCOR MIE GMBH·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →