Inventor · disambiguated record
Sam X. Sun
Also filed as: SUN SAM · SUN SAM X · SUN SAM XUNYUN
6 granted patents·3 pending applications·35 citations·filing 2004–2023
80Inventor score
Top patents by PatentIndex Score
9 records- 0187US8911932B2Photo-imageable hardmask with positive tone for microphotolithographySUN SAM XUNYUN·Filed 2010·Granted Dec 16, 2014·10 cites·8 claims
- 0284US8415083B2On-track process for patterning hardmask by multiple dark field exposuresSUN SAM X·Filed 2011·Granted Apr 9, 2013·6 cites·11 claims
- 0373US8728710B2Photo-imageable hardmask with dual tones for microphotolithographySUN SAM XUNYUN·Filed 2010·Granted May 20, 2014·3 cites·8 claims
- 0470US8133659B2On-track process for patterning hardmask by multiple dark field exposuresSUN SAM X·Filed 2009·Granted Mar 13, 2012·3 cites·14 claims
- 0566US7364832B2Wet developable hard mask in conjunction with thin photoresist for micro photolithographyBREWER SCIENCE INC·Filed 2004·Granted Apr 29, 2008·11 cites·20 claims
- 0662US8168372B2Method of creating photolithographic structures with developer-trimmed hard maskSUN SAM X·Filed 2007·Granted May 1, 2012·2 cites·20 claims
- 0753US2025231492A1Manufacture of integrated ciruit using positive tone photopatternable dielectric including high silicon content polysilsesquioxaneSUNTIFIC MAT WEIFANG LTD·Filed 2023·Application pending·0 cites
- 0853US2025231491A1Photolithographic method using silicon photoresistSUNTIFIC MAT WEIFANG LTD·Filed 2023·Application pending·0 cites
- 0931US2010255412A1Photo-imaging Hardmask with Negative Tone for MicrophotolithographySUN SAM XUNYUN·Filed 2010·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Sam X. Sun files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →