Assignee
SUN SAM XUNYUN
US·2 granted patents·1 pending application·13 citations·filing 2010–2010
Top patents by PatentIndex Score
3 records- 0187US8911932B2Photo-imageable hardmask with positive tone for microphotolithographySUN SAM XUNYUN·Filed 2010·Granted Dec 16, 2014·10 cites·8 claims
- 0273US8728710B2Photo-imageable hardmask with dual tones for microphotolithographySUN SAM XUNYUN·Filed 2010·Granted May 20, 2014·3 cites·8 claims
- 0331US2010255412A1Photo-imaging Hardmask with Negative Tone for MicrophotolithographySUN SAM XUNYUN·Filed 2010·Application pending·0 cites
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