Inventor · disambiguated record
Walter Augustyn
Also filed as: AUGUSTYN WALTER · AUGUSTYN WALTER H · RYZHIKOV LEV
9 granted patents·2 pending applications·120 citations·filing 1985–2008
89Inventor score
Top patents by PatentIndex Score
11 records- 0183US6813003B2Advanced illumination system for use in microlithographyFiled 2002·Granted Nov 2, 2004·18 cites·96 claims
- 0280US7164534B2Diffuser plate and method of making sameASML HOLDING NV·Filed 2005·Granted Jan 16, 2007·10 cites·34 claims
- 0379US7365848B2System and method using visible and infrared light to align and measure alignment patterns on multiple layersASML HOLDING NV·Filed 2005·Granted Apr 29, 2008·6 cites·18 claims
- 0478US7002747B2Diffuser plate and method of making sameASML HOLDING NV·Filed 2003·Granted Feb 21, 2006·19 cites·27 claims
- 0575US6775069B2Advanced illumination system for use in microlithographyASML HOLDING NV·Filed 2002·Granted Aug 10, 2004·18 cites·18 claims
- 0674US7187430B2Advanced illumination system for use in microlithographyASML HOLDING NV·Filed 2004·Granted Mar 6, 2007·10 cites·30 claims
- 0772US4702603AOptical phase decoder for interferometersCMX SYSTEMS INC·Filed 1985·Granted Oct 27, 1987·31 cites·7 claims
- 0868US6819402B2System and method for laser beam expansionASML HOLDING NV·Filed 2002·Granted Nov 16, 2004·8 cites·17 claims
- 0953US2007146674A1Advanced Illumination System for Use in MicrolithographyASML HOLDING NV·Filed 2007·Application pending·0 cites
- 1048US2008198363A1System and Method to Align and Measure Alignment Patterns on Multiple LayersASML HOLDING NV·Filed 2008·Application pending·0 cites
- 1143US7006198B2System and method for laser beam expansionASML HOLDING NV·Filed 2004·Granted Feb 28, 2006·0 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →