Inventor · disambiguated record
Yutaka Shiraishi
Also filed as: SHIRAISHI YUTAKA
44 granted patents·4 pending applications·225 citations·filing 1990–2023
97Inventor score
Files withGIGAPHOTON INC25KOMATSU DENSHI KINZOKU KK5SUPER SILICON CRYSTAL RES INST4SUMCO TECHXIV CORP3JAPAN RES DEV CORP2
Top patents by PatentIndex Score
48 records- 0186US10955760B2Extreme ultraviolet light generation device and target supply deviceGIGAPHOTON INC·Filed 2020·Granted Mar 23, 2021·2 cites·20 claims
- 0286US10629414B2Target supply device, target material refining method, recording medium having target material refining program recorded therein, and target generatorGIGAPHOTON INC·Filed 2019·Granted Apr 21, 2020·2 cites·22 claims
- 0384US9894744B2Extreme ultraviolet light generation apparatusGIGAPHOTON INC·Filed 2016·Granted Feb 13, 2018·3 cites·18 claims
- 0479US10349508B2Target storage deviceGIGAPHOTON INC·Filed 2018·Granted Jul 9, 2019·2 cites·20 claims
- 0575US10225917B2Target supply device and extreme ultraviolet light generating deviceGIGAPHOTON INC·Filed 2018·Granted Mar 5, 2019·2 cites·20 claims
- 0675US6361597B1Single crystal material auxiliary melting apparatus and single crystal material melting methodSUPER SILICON CRYSTAL RES INST·Filed 1998·Granted Mar 26, 2002·35 cites·15 claims
- 0774US10028365B2Chamber device, target generation method, and extreme ultraviolet light generation systemGIGAPHOTON INC·Filed 2017·Granted Jul 17, 2018·1 cites·14 claims
- 0872US9039957B2Target material refinement device and target supply apparatusGIGAPHOTON INC·Filed 2013·Granted May 26, 2015·3 cites·9 claims
- 0971US8865342B2Polycarbonate resin composition and molded articleMONDEN TOSHIKI·Filed 2011·Granted Oct 21, 2014·1 cites·20 claims
- 1070US8150784B2Control system and method for controlled object in time variant system with dead time, such as single crystal production device by czochralski methodBANDOH KENICHI·Filed 2006·Granted Apr 3, 2012·2 cites·5 claims
- 1169US5660629AApparatus for detecting the diameter of a single-crystal siliconKOMATSU DENSHI KINZOKU KK·Filed 1996·Granted Aug 26, 1997·21 cites·3 claims
- 1269US5427056AApparatus and method for producing single crystalKOMATSU DENSHI KINZOKU KK·Filed 1990·Granted Jun 27, 1995·21 cites·20 claims
- 1366US5942169AOptimization of overmolding method for three-dimensional hollow molded articleMITSUBISHI ENG PLASTICS CORP·Filed 1995·Granted Aug 24, 1999·26 cites·18 claims
- 1465US8864906B2Method for producing silicon waferKUROKI HIDETOSHI·Filed 2006·Granted Oct 21, 2014·2 cites·4 claims
- 1564US8835534B2Aromatic polycarbonate resin composition, method for producing the resin composition, and molded article of the sameKUROKAWA HARUHIKO·Filed 2010·Granted Sep 16, 2014·1 cites·7 claims
- 1664US8241424B2Single crystal semiconductor manufacturing apparatus and manufacturing methodIIDA TETSUHIRO·Filed 2006·Granted Aug 14, 2012·1 cites·6 claims
- 1763US5488923AMethod for producing single crystalKOMATSU DENSHI KINZOKU KK·Filed 1995·Granted Feb 6, 1996·17 cites·2 claims
- 1862US12185449B2EUV light generation apparatus, electronic device manufacturing method, and inspection methodGIGAPHOTON INC·Filed 2022·Granted Dec 31, 2024·0 cites·20 claims
- 1962US7875116B2Silicon single crystal producing method, annealed wafer, and method of producing annealed waferSUMCO TECHXIV CORP·Filed 2006·Granted Jan 25, 2011·2 cites·8 claims
- 2061US7160386B2Single crystal semiconductor manufacturing apparatus and manufacturing method, and single crystal ingotKOMATSU DENSHI KINZOKU KK·Filed 2002·Granted Jan 9, 2007·4 cites·6 claims
- 2161US6202883B1Tray for semiconductor integrated circuit devicesMITSUBISHI ENG PLASTICS CORP·Filed 1999·Granted Mar 20, 2001·28 cites·10 claims
- 2258US5524574AControl of oxygen concentration in single crystal pulled up from melt containing Group-V elementJAPAN RES DEV CORP·Filed 1994·Granted Jun 11, 1996·14 cites·5 claims
- 2356US8748853B2Chamber apparatusNAGAI SHINJI·Filed 2012·Granted Jun 10, 2014·1 cites·8 claims
- 2455US12150233B2Target substance replenishment device, extreme ultraviolet light generation apparatus, and electronic device manufacturing methodGIGAPHOTON INC·Filed 2022·Granted Nov 19, 2024·0 cites·20 claims
- 2554US7918934B2Single crystal semiconductor manufacturing apparatus and manufacturing method, and single crystal ingotSUMCO TECHXIV CORP·Filed 2006·Granted Apr 5, 2011·0 cites·2 claims
- 2653US10524343B2Extreme ultraviolet light generation apparatusGIGAPHOTON INC·Filed 2019·Granted Dec 31, 2019·0 cites·18 claims
- 2753US10237961B2Target supply device, processing device and processing method thereforGIGAPHOTON INC·Filed 2018·Granted Mar 19, 2019·0 cites·14 claims
- 2853US2017053780A1Target supply device, target material refining method, recording medium having target material refining program recorded therein, and target generatorGIGAPHOTON INC·Filed 2016·Application pending·0 cites
- 2952US10136509B2Target supply device, processing device and processing method thefeforGIGAPHOTON INC·Filed 2017·Granted Nov 20, 2018·0 cites·19 claims
- 3052US5450814ASingle crystal pulling apparatus having slidable shield plate to control area of opening around single crystalJAPAN RES DEV CORP·Filed 1993·Granted Sep 19, 1995·14 cites·4 claims
- 3151US12207382B2Target supply system, extreme ultraviolet light generation apparatus, and electronic device manufacturing methodGIGAPHOTON INC·Filed 2023·Granted Jan 21, 2025·0 cites·20 claims
- 3251US11320740B2Target supply device, target supply method, and electronic device manufacturing methodGIGAPHOTON INC·Filed 2021·Granted May 3, 2022·0 cites·19 claims
- 3351US11310899B2Target supply device, target supply method, and electronic device manufacturing methodGIGAPHOTON INC·Filed 2021·Granted Apr 19, 2022·0 cites·20 claims
- 3451US10073353B2Target supply device and EUV light generation apparatusGIGAPHOTON INC·Filed 2016·Granted Sep 11, 2018·0 cites·24 claims
- 3551US2018341180A1Target supply device and euv light generation apparatusGIGAPHOTON INC·Filed 2018·Application pending·0 cites
- 3650US11474433B2Extreme ultraviolet light generation apparatus and electronic device manufacturing methodGIGAPHOTON INC·Filed 2020·Granted Oct 18, 2022·0 cites·20 claims
- 3750US11360391B2Target supply device, extreme ultraviolet light generating apparatus, and electronic device manufacturing methodGIGAPHOTON INC·Filed 2020·Granted Jun 14, 2022·0 cites·16 claims
- 3850US10143074B2Filter and target supply apparatusGIGAPHOTON INC·Filed 2014·Granted Nov 27, 2018·0 cites·22 claims
- 3949US11363706B2Target supply device, extreme ultraviolet light generation apparatus, and electronic device manufacturing methodGIGAPHOTON INC·Filed 2021·Granted Jun 14, 2022·0 cites·15 claims
- 4045US10372041B2Target generation device and extreme ultraviolet light generation deviceGIGAPHOTON INC·Filed 2019·Granted Aug 6, 2019·0 cites·19 claims
- 4145US9648715B2Target supply deviceGIGAPHOTON INC·Filed 2016·Granted May 9, 2017·0 cites·7 claims
- 4245US6217648B1Single crystal pull-up apparatus and single crystal pull-up methodSUPER SILICON CRYSTAL RES INST·Filed 1998·Granted Apr 17, 2001·11 cites·15 claims
- 4345US2009143512A1Polycarbonate Resin Composition and Molded Product Produced from the SameMASUKI TATSUYA·Filed 2006·Application pending·0 cites
- 4438US7226506B2Single crystal silicon producing method, single crystal silicon wafer producing method, seed crystal for producing single crystal silicon, single crystal silicon ingot, and single crystal silicon waferSUMCO TECHXIV CORP·Filed 2003·Granted Jun 5, 2007·3 cites·13 claims
- 4533US6033472ASemiconductor single crystal manufacturing apparatusSUPER SILICON CRYSTAL RES INST·Filed 1998·Granted Mar 7, 2000·3 cites·9 claims
- 4633US5681758AMethod for fabricating semiconductor single crystalKOMATSU DENSHI KINZOKU KK·Filed 1996·Granted Oct 28, 1997·2 cites·3 claims
- 4733US2015144809A1Target supply device and extreme ultraviolet light generation apparatusGIGAPHOTON INC·Filed 2015·Application pending·0 cites
- 4831US6077348ASingle crystal pulling apparatus, single crystal support mechanism, and single crystal pulling methodSUPER SILICON CRYSTAL RES INST·Filed 1998·Granted Jun 20, 2000·1 cites·15 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →