Inventor · disambiguated record
Tai-Hon Philip Chang
Also filed as: CHANG TAI-HON P · CHANG TAI-HON PHILIP
22 granted patents·774 citations·filing 1975–2001
97Inventor score
Top patents by PatentIndex Score
22 records- 0196US6429443B1Multiple beam electron beam lithography systemAPPLIED MATERIALS INC·Filed 2000·Granted Aug 6, 2002·90 cites·9 claims
- 0295US5122663ACompact, integrated electron beam imaging systemIBM·Filed 1991·Granted Jun 16, 1992·100 cites·13 claims
- 0392US4477729AContinuously writing electron beam stitched pattern exposure systemIBM·Filed 1982·Granted Oct 16, 1984·44 cites·11 claims
- 0488US6555830B1Suppression of emission noise for microcolumn applications in electron beam inspectionAPPLIED MATERIALS INC·Filed 2000·Granted Apr 29, 2003·30 cites·18 claims
- 0588US6281508B1Precision alignment and assembly of microlenses and microcolumnsETEC SYSTEMS INC·Filed 1999·Granted Aug 28, 2001·53 cites·28 claims
- 0688US6023060AT-shaped electron-beam microcolumn as a general purpose scanning electron microscopeETEC SYSTEMS INC·Filed 1998·Granted Feb 8, 2000·58 cites·20 claims
- 0786US6220914B1Method of forming gated photocathode for controlled single and multiple electron beam emissionETEC SYSTEMS INC·Filed 1999·Granted Apr 24, 2001·42 cites·18 claims
- 0886US6145438AMethod and apparatus for direct writing of semiconductor die using microcolumn arrayFiled 1998·Granted Nov 14, 2000·50 cites·24 claims
- 0984US4165395AProcess for forming a high aspect ratio structure by successive exposures with electron beam and actinic radiationIBM·Filed 1977·Granted Aug 21, 1979·42 cites·16 claims
- 1083US5155412AMethod for selectively scaling a field emission electron gun and device formed therebyIBM·Filed 1991·Granted Oct 13, 1992·44 cites·14 claims
- 1179US6195214B1Microcolumn assembly using laser spot weldingETEC SYSTEMS INC·Filed 1999·Granted Feb 27, 2001·32 cites·24 claims
- 1278US6555829B1High precision flexure stageAPPLIED MATERIALS INC·Filed 2000·Granted Apr 29, 2003·22 cites·20 claims
- 1377US6376985B2Gated photocathode for controlled single and multiple electron beam emissionAPPLIED MATERIALS INC·Filed 1998·Granted Apr 23, 2002·25 cites·35 claims
- 1475US6288401B1Electrostatic alignment of a charged particle beamETEC SYSTEMS INC·Filed 1999·Granted Sep 11, 2001·26 cites·20 claims
- 1574US6717146B2Tandem microchannel plate and solid state electron detectorAPPLIED MATERIALS INC·Filed 2001·Granted Apr 6, 2004·11 cites·21 claims
- 1674US3956635ACombined multiple beam size and spiral scan method for electron beam writing of microcircuit patternsIBM·Filed 1975·Granted May 11, 1976·28 cites·10 claims
- 1767US6376984B1Patterned heat conducting photocathode for electron beam sourceAPPLIED MATERIALS INC·Filed 1999·Granted Apr 23, 2002·19 cites·20 claims
- 1864US6011269AShaped shadow projection for an electron beam columnETEC SYSTEMS INC·Filed 1998·Granted Jan 4, 2000·16 cites·15 claims
- 1963US4426583AElectron beam potential switching apparatusIBM·Filed 1982·Granted Jan 17, 1984·12 cites·9 claims
- 2052US6008060ADetecting registration marks with a low energy electron beamETEC SYSTEMS INC·Filed 1998·Granted Dec 28, 1999·18 cites·13 claims
- 2152US4621232AInspection of unsintered single layer or multilayer ceramics using a broad area electrical contacting structureIBM·Filed 1984·Granted Nov 4, 1986·12 cites·3 claims
- 2224US6127738ADetecting registration marks with low energy electron beamFiled 1999·Granted Oct 3, 2000·0 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →