Inventor · disambiguated record
Guangqing Chen
Also filed as: CHEN GUANGQING
11 granted patents·3 pending applications·102 citations·filing 2006–2023
88Inventor score
Top patents by PatentIndex Score
14 records- 0197US7488933B2Method for lithography model calibrationBRION TECH INC·Filed 2006·Granted Feb 10, 2009·58 cites·104 claims
- 0296US9804504B2Method and apparatus for design of a metrology targetASML NETHERLANDS BV·Filed 2016·Granted Oct 31, 2017·13 cites·20 claims
- 0395US9355200B2Method and apparatus for design of a metrology targetASML NETHERLANDS BV·Filed 2014·Granted May 31, 2016·16 cites·20 claims
- 0487US11221560B2Method and apparatus for design of a metrology targetASML NETHERLANDS BV·Filed 2014·Granted Jan 11, 2022·4 cites·20 claims
- 0586US9494874B2Method and apparatus for design of a metrology targetASML NETHERLANDS BV·Filed 2014·Granted Nov 15, 2016·5 cites·18 claims
- 0674US10296681B2Process based metrology target designASML NETHERLANDS BV·Filed 2018·Granted May 21, 2019·1 cites·23 claims
- 0773US10007744B2Process based metrology target designASML NETHERLANDS BV·Filed 2015·Granted Jun 26, 2018·2 cites·20 claims
- 0872US12510829B2Method and apparatus for design of a metrology targetASML NETHERLANDS BV·Filed 2021·Granted Dec 30, 2025·0 cites·21 claims
- 0970US11580274B2Method and apparatus for inspection and metrologyASML NETHERLANDS BV·Filed 2016·Granted Feb 14, 2023·1 cites·20 claims
- 1069US12204826B2Method and apparatus for inspection and metrologyASML NETHERLANDS BV·Filed 2023·Granted Jan 21, 2025·0 cites·20 claims
- 1167US10296692B2Method and apparatus for design of a metrology targetASML NETHERLANDS BV·Filed 2014·Granted May 21, 2019·2 cites·20 claims
- 1253US2025044710A1Overlay metrology based on template matching with adaptive weightingASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 1351US2025231129A1E-beam optimization for overlay measurement of buried featuresASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 1441US2023184560A1Visual interface display method and apparatus, electronic device, and storage mediumGUANGZHOU WERIDE TECH LIMITED COMPANY·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →