Assignee
BRION TECH INC
US·29 granted patents·2,697 citations·filing 2003–2007
Top patents by PatentIndex Score
29 records- 0199US7587704B2System and method for mask verification using an individual mask error modelBRION TECH INC·Filed 2006·Granted Sep 8, 2009·483 cites·17 claims
- 0298US7694267B1Method for process window optimized optical proximity correctionBRION TECH INC·Filed 2007·Granted Apr 6, 2010·86 cites·16 claims
- 0398US7120895B2System and method for lithography simulationBRION TECH INC·Filed 2005·Granted Oct 10, 2006·73 cites·28 claims
- 0498US7117478B2System and method for lithography simulationBRION TECH INC·Filed 2005·Granted Oct 3, 2006·61 cites·52 claims
- 0598US7003758B2System and method for lithography simulationBRION TECH INC·Filed 2004·Granted Feb 21, 2006·281 cites·35 claims
- 0698US6884984B2System and method for lithography process monitoring and controlBRION TECH INC·Filed 2004·Granted Apr 26, 2005·101 cites·53 claims
- 0798US6828542B2System and method for lithography process monitoring and controlBRION TECH INC·Filed 2003·Granted Dec 7, 2004·120 cites·40 claims
- 0898US6803554B2System and method for lithography process monitoring and controlBRION TECH INC·Filed 2003·Granted Oct 12, 2004·107 cites·49 claims
- 0997US7695876B2Method for identifying and using process window signature patterns for lithography process controlBRION TECH INC·Filed 2006·Granted Apr 13, 2010·61 cites·26 claims
- 1097US7488933B2Method for lithography model calibrationBRION TECH INC·Filed 2006·Granted Feb 10, 2009·58 cites·104 claims
- 1197US7111277B2System and method for lithography simulationBRION TECH INC·Filed 2004·Granted Sep 19, 2006·65 cites·38 claims
- 1297US7053355B2System and method for lithography process monitoring and controlBRION TECH INC·Filed 2005·Granted May 30, 2006·93 cites·34 claims
- 1397US6969837B2System and method for lithography process monitoring and controlBRION TECH INC·Filed 2004·Granted Nov 29, 2005·82 cites·30 claims
- 1497US6969864B2System and method for lithography process monitoring and controlBRION TECH INC·Filed 2004·Granted Nov 29, 2005·71 cites·41 claims
- 1597US6807503B2Method and apparatus for monitoring integrated circuit fabricationBRION TECH INC·Filed 2003·Granted Oct 19, 2004·126 cites·50 claims
- 1697US6806456B1System and method for lithography process monitoring and controlBRION TECH INC·Filed 2003·Granted Oct 19, 2004·86 cites·32 claims
- 1796US7703069B1Three-dimensional mask model for photolithography simulationBRION TECH INC·Filed 2007·Granted Apr 20, 2010·128 cites·23 claims
- 1896US7617477B2Method for selecting and optimizing exposure tool using an individual mask error modelBRION TECH INC·Filed 2006·Granted Nov 10, 2009·47 cites·14 claims
- 1996US6820028B2Method and apparatus for monitoring integrated circuit fabricationBRION TECH INC·Filed 2004·Granted Nov 16, 2004·81 cites·43 claims
- 2095US7233874B2Method and apparatus for monitoring integrated circuit fabricationBRION TECH INC·Filed 2005·Granted Jun 19, 2007·23 cites·22 claims
- 2195US7114145B2System and method for lithography simulationBRION TECH INC·Filed 2004·Granted Sep 26, 2006·63 cites·54 claims
- 2295US6959255B2Method and apparatus for monitoring integrated circuit fabricationBRION TECH INC·Filed 2004·Granted Oct 25, 2005·67 cites·66 claims
- 2395US6906305B2System and method for aerial image sensingBRION TECH INC·Filed 2003·Granted Jun 14, 2005·69 cites·27 claims
- 2495US6879924B2Method and apparatus for monitoring integrated circuit fabricationBRION TECH INC·Filed 2004·Granted Apr 12, 2005·62 cites·65 claims
- 2594US6892156B2Method and apparatus for monitoring integrated circuit fabricationBRION TECH INC·Filed 2004·Granted May 10, 2005·53 cites·28 claims
- 2693US7707538B2Multivariable solver for optical proximity correctionBRION TECH INC·Filed 2007·Granted Apr 27, 2010·28 cites·60 claims
- 2792US7558419B1System and method for detecting integrated circuit pattern defectsBRION TECH INC·Filed 2004·Granted Jul 7, 2009·48 cites·35 claims
- 2892US7171334B2Method and apparatus for synchronizing data acquisition of a monitored IC fabrication processBRION TECH INC·Filed 2004·Granted Jan 30, 2007·73 cites·26 claims
- 2964US7564017B2System and method for characterizing aerial image quality in a lithography systemBRION TECH INC·Filed 2006·Granted Jul 21, 2009·1 cites·22 claims
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