Inventor · disambiguated record
Maurice E. Ewert
Also filed as: EWERT MAURICE E
9 granted patents·2 pending applications·57 citations·filing 2004–2019
86Inventor score
Top patents by PatentIndex Score
11 records- 0190US7736473B2Magnetron having continuously variable radial positionAPPLIED MATERIALS INC·Filed 2005·Granted Jun 15, 2010·11 cites·8 claims
- 0288US8404048B2Off-angled heating of the underside of a substrate using a lamp assemblyEWERT MAURICE E·Filed 2011·Granted Mar 26, 2013·12 cites·16 claims
- 0388US7018515B2Selectable dual position magnetronAPPLIED MATERIALS INC·Filed 2004·Granted Mar 28, 2006·21 cites·40 claims
- 0484US8685215B2Mechanism for continuously varying radial position of a magnetronMILLER KEITH A·Filed 2010·Granted Apr 1, 2014·5 cites·12 claims
- 0579US9818587B2Off-angled heating of the underside of a substrate using a lamp assemblyAPPLIED MATERIALS INC·Filed 2013·Granted Nov 14, 2017·3 cites·21 claims
- 0676US10504719B2Cooled reflective adapter plate for a deposition chamberGOEL ASHISH·Filed 2013·Granted Dec 10, 2019·3 cites·19 claims
- 0766US9863038B2Off-angled heating of the underside of a substrate using a lamp assemblyAPPLIED MATERIALS INC·Filed 2013·Granted Jan 9, 2018·1 cites·17 claims
- 0860US8992741B2Method for ultra-uniform sputter deposition using simultaneous RF and DC power on targetWANG RONGJUN·Filed 2008·Granted Mar 31, 2015·1 cites·14 claims
- 0959US2009308732A1Apparatus and method for uniform depositionAPPLIED MATERIALS INC·Filed 2009·Application pending·0 cites
- 1058US10903067B2Cooled reflective adapter plate for a deposition chamberAPPLIED MATERIALS INC·Filed 2019·Granted Jan 26, 2021·0 cites·20 claims
- 1153US2009308739A1Wafer processing deposition shielding componentsAPPLIED MATERIALS INC·Filed 2009·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →