Inventor · disambiguated record
Hiroki Sasano
Also filed as: SASANO HIROKI
8 granted patents·2 pending applications·196 citations·filing 2002–2008
89Inventor score
Top patents by PatentIndex Score
10 records- 0193US6960416B2Method and apparatus for controlling etch processes during fabrication of semiconductor devicesAPPLIED MATERIALS INC·Filed 2003·Granted Nov 1, 2005·65 cites·18 claims
- 0291US7498106B2Method and apparatus for controlling etch processes during fabrication of semiconductor devicesAPPLIED MATERIALS INC·Filed 2005·Granted Mar 3, 2009·18 cites·18 claims
- 0386US7094613B2Method for controlling accuracy and repeatability of an etch processAPPLIED MATERIALS INC·Filed 2003·Granted Aug 22, 2006·36 cites·20 claims
- 0484US6858361B2Methodology for repeatable post etch CD in a production toolFiled 2002·Granted Feb 22, 2005·34 cites·33 claims
- 0577US6924088B2Method and system for realtime CD microloading controlAPPLIED MATERIALS INC·Filed 2003·Granted Aug 2, 2005·19 cites·59 claims
- 0670US8133817B2Shallow trench isolation etch processSASANO HIROKI·Filed 2008·Granted Mar 13, 2012·7 cites·23 claims
- 0764US7262865B2Method and apparatus for controlling a calibration cycle or a metrology toolAPPLIED MATERIALS INC·Filed 2004·Granted Aug 28, 2007·9 cites·15 claims
- 0862US7482178B2Chamber stability monitoring using an integrated metrology toolAPPLIED MATERIALS INC·Filed 2003·Granted Jan 27, 2009·8 cites·6 claims
- 0943US2009032880A1Method and apparatus for tunable isotropic recess etching of silicon materialsAPPLIED MATERIALS INC·Filed 2007·Application pending·0 cites
- 1030US2005064714A1Method for controlling critical dimensions during an etch processAPPLIED MATERIALS INC·Filed 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →