Inventor · disambiguated record
Theodorus Marinus Modderman
Also filed as: MODDERMAN THEODORUS M · MODDERMAN THEODORUS MARINUS
39 granted patents·4 pending applications·3,190 citations·filing 1992–2023
98Inventor score
Files withASML NETHERLANDS BV34LOF JOERI3MODDERMAN THEODORUS MARINUS3DE SMIT JOANNES THEODOOR2FOKKER AIRCRAFT1
Top patents by PatentIndex Score
43 records- 0199US7388648B2Lithographic projection apparatusASML NETHERLANDS BV·Filed 2005·Granted Jun 17, 2008·136 cites·20 claims
- 0299US7193232B2Lithographic apparatus and device manufacturing method with substrate measurement not through liquidASML NETHERLANDS BV·Filed 2003·Granted Mar 20, 2007·216 cites·33 claims
- 0399US7081943B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Jul 25, 2006·199 cites·51 claims
- 0499US6952253B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Oct 4, 2005·1.8k cites·45 claims
- 0598US7528931B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted May 5, 2009·76 cites·13 claims
- 0698US7482611B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Jan 27, 2009·65 cites·38 claims
- 0798US7372541B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted May 13, 2008·74 cites·32 claims
- 0897US8233137B2Lithographic apparatus and device manufacturing methodMODDERMAN THEODORUS MARINUS·Filed 2008·Granted Jul 31, 2012·54 cites·38 claims
- 0997US7317504B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Jan 8, 2008·114 cites·24 claims
- 1096US7795603B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2008·Granted Sep 14, 2010·15 cites·18 claims
- 1196US7684008B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Mar 23, 2010·58 cites·69 claims
- 1296US6674510B1Off-axis levelling in lithographic projection apparatusASML NETHERLANDS BV·Filed 2000·Granted Jan 6, 2004·192 cites·95 claims
- 1395US7982850B2Immersion lithographic apparatus and device manufacturing method with gas supplyASML NETHERLANDS BV·Filed 2008·Granted Jul 19, 2011·14 cites·20 claims
- 1495US7206058B2Off-axis levelling in lithographic projection apparatusASML NETHERLANDS BV·Filed 2006·Granted Apr 17, 2007·20 cites·14 claims
- 1593US9116443B2Lithographic apparatus and device manufacturing methodMODDERMAN THEODORUS MARINUS·Filed 2011·Granted Aug 25, 2015·6 cites·15 claims
- 1693US9091940B2Lithographic apparatus and method involving a fluid inlet and a fluid outletASML NETHERLANDS BV·Filed 2012·Granted Jul 28, 2015·5 cites·71 claims
- 1793US8797503B2Lithographic apparatus and device manufacturing method with a liquid inlet above an aperture of a liquid confinement structureLOF JOERI·Filed 2011·Granted Aug 5, 2014·5 cites·20 claims
- 1893US8462312B2Lithographic apparatus and device manufacturing methodMODDERMAN THEODORUS MARINUS·Filed 2011·Granted Jun 11, 2013·6 cites·16 claims
- 1988US9417535B2Lithographic apparatusASML NETHERLANDS BV·Filed 2015·Granted Aug 16, 2016·2 cites·22 claims
- 2086US10620545B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Apr 14, 2020·1 cites·20 claims
- 2186US8363208B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2010·Granted Jan 29, 2013·3 cites·19 claims
- 2284US7019815B2Off-axis leveling in lithographic projection apparatusASML NETHERLANDS BV·Filed 2004·Granted Mar 28, 2006·19 cites·11 claims
- 2383US7078715B2Lithographic apparatus and apparatus adjustment methodASML NETHERLANDS BV·Filed 2004·Granted Jul 18, 2006·24 cites·16 claims
- 2482US9835960B2Lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted Dec 5, 2017·1 cites·19 claims
- 2581US6882405B2Off-axis levelling in lithographic projection apparatusASML NETHERLANDS BV·Filed 2003·Granted Apr 19, 2005·13 cites·10 claims
- 2676US2024103386A1Apparatus and method for determining a condition associated with a pellicleASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 2770US10248035B2Lithographic apparatusASML NETHERLANDS BV·Filed 2017·Granted Apr 2, 2019·0 cites·19 claims
- 2868US9329494B2Lithographic apparatusASML NETHERLANDS BV·Filed 2014·Granted May 3, 2016·0 cites·20 claims
- 2968US5303590AMethod of and an apparatus for frequency selective ultrasonic inspection of multi-layered structuresFOKKER AIRCRAFT·Filed 1992·Granted Apr 19, 1994·39 cites·20 claims
- 3064US10222706B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Mar 5, 2019·0 cites·20 claims
- 3163US7202938B2Off-axis levelling in lithographic projection apparatusASML NETHERLANDS BV·Filed 2004·Granted Apr 10, 2007·5 cites·15 claims
- 3261US9195153B2Lithographic apparatus and device manufacturing methodLOF JOERI·Filed 2012·Granted Nov 24, 2015·0 cites·10 claims
- 3360US11906907B2Apparatus and method for determining a condition associated with a pellicleASML NETHERLANDS BV·Filed 2018·Granted Feb 20, 2024·0 cites·20 claims
- 3460US8208120B2Lithographic apparatus and device manufacturing methodLOF JOERI·Filed 2008·Granted Jun 26, 2012·0 cites·18 claims
- 3560US2016062248A1Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Application pending·0 cites
- 3659US9964858B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted May 8, 2018·0 cites·20 claims
- 3754US8344341B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2010·Granted Jan 1, 2013·0 cites·9 claims
- 3852US7835017B2Lithographic apparatus, method of exposing a substrate, method of measurement, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Granted Nov 16, 2010·3 cites·28 claims
- 3951US9110389B2Lithographic apparatus and device manufacturing methodDE SMIT JOANNES THEODOOR·Filed 2011·Granted Aug 18, 2015·0 cites·21 claims
- 4051US2012008117A1Lithographic apparatus and device manufacturing methodDE SMIT JOANNES THEODOOR·Filed 2011·Application pending·0 cites
- 4147US10001712B2Immersion lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Jun 19, 2018·0 cites·20 claims
- 4239US10324384B2Lithographic apparatus and a method of manufacturing a lithographic apparatusASML NETHERLANDS BV·Filed 2015·Granted Jun 18, 2019·0 cites·20 claims
- 4338US2005134816A1Lithographic apparatus, method of exposing a substrate, method of measurement, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →