Assignee
LOF JOERI
NL·12 granted patents·82 citations·filing 2006–2012
Technology mixG03F12
Top patents by PatentIndex Score
12 records- 0199US8482845B2Lithographic apparatus and device manufacturing methodLOF JOERI·Filed 2010·Granted Jul 9, 2013·32 cites·16 claims
- 0296US9482966B2Lithographic apparatus and device manufacturing methodLOF JOERI·Filed 2012·Granted Nov 1, 2016·12 cites·74 claims
- 0396US8154708B2Lithographic apparatus and device manufacturing methodLOF JOERI·Filed 2006·Granted Apr 10, 2012·23 cites·20 claims
- 0495US8472002B2Lithographic apparatus and device manufacturing methodLOF JOERI·Filed 2010·Granted Jun 25, 2013·7 cites·28 claims
- 0593US8797503B2Lithographic apparatus and device manufacturing method with a liquid inlet above an aperture of a liquid confinement structureLOF JOERI·Filed 2011·Granted Aug 5, 2014·5 cites·20 claims
- 0688US8558989B2Lithographic apparatus and device manufacturing methodLOF JOERI·Filed 2010·Granted Oct 15, 2013·3 cites·33 claims
- 0763US9057967B2Lithographic apparatus and device manufacturing methodLOF JOERI·Filed 2009·Granted Jun 16, 2015·0 cites·10 claims
- 0862US9541843B2Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquidLOF JOERI·Filed 2011·Granted Jan 10, 2017·0 cites·35 claims
- 0961US9195153B2Lithographic apparatus and device manufacturing methodLOF JOERI·Filed 2012·Granted Nov 24, 2015·0 cites·10 claims
- 1061US9152058B2Lithographic apparatus and device manufacturing method involving a member and a fluid openingLOF JOERI·Filed 2011·Granted Oct 6, 2015·0 cites·19 claims
- 1161US9081299B2Lithographic apparatus and device manufacturing method involving removal of liquid entering a gapLOF JOERI·Filed 2011·Granted Jul 14, 2015·0 cites·20 claims
- 1260US8208120B2Lithographic apparatus and device manufacturing methodLOF JOERI·Filed 2008·Granted Jun 26, 2012·0 cites·18 claims
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