Inventor · disambiguated record
Ravinder Aggarwal
Also filed as: AGGARWAL RAVINDER · AGGARWAL RAVINDER K
45 granted patents·12 pending applications·5,356 citations·filing 1989–2022
99Inventor score
Top patents by PatentIndex Score
57 records- 0198US9267850B2Thermocouple assembly with guarded thermocouple junctionASM INC·Filed 2013·Granted Feb 23, 2016·467 cites·17 claims
- 0298US8382370B2Thermocouple assembly with guarded thermocouple junctionASM INC·Filed 2009·Granted Feb 26, 2013·345 cites·9 claims
- 0398US7725012B2Movable radiant heat sourcesASM INC·Filed 2007·Granted May 25, 2010·391 cites·32 claims
- 0497USD600223SSusceptor ringAGGARWAL RAVINDER·Filed 2008·Granted Sep 15, 2009·483 cites·1 claims
- 0597US6776849B2Wafer holder with peripheral lift ringASM INC·Filed 2002·Granted Aug 17, 2004·324 cites·36 claims
- 0696US6696367B1System for the improved handling of wafers within a process toolASM INC·Filed 2002·Granted Feb 24, 2004·452 cites·14 claims
- 0796US4987856AHigh throughput multi station processor for multiple single wafersADVANCED SEMICONDUCTOR MAT·Filed 1989·Granted Jan 29, 1991·706 cites·27 claims
- 0895US8616765B2ThermocoupleDARABNIA BUZ·Filed 2012·Granted Dec 31, 2013·469 cites·18 claims
- 0995US7648579B2Substrate support system for reduced autodoping and backside depositionASM INC·Filed 2005·Granted Jan 19, 2010·42 cites·30 claims
- 1094US9297705B2Smart temperature measuring deviceAGGARWAL RAVINDER K·Filed 2009·Granted Mar 29, 2016·467 cites·14 claims
- 1194US8100583B2ThermocoupleCONNER RAND·Filed 2009·Granted Jan 24, 2012·478 cites·15 claims
- 1294US6899145B2Front opening unified podASM INC·Filed 2003·Granted May 31, 2005·87 cites·29 claims
- 1393US8067061B2Reaction apparatus having multiple adjustable exhaust portsAGGARWAL RAVINDER·Filed 2007·Granted Nov 29, 2011·16 cites·6 claims
- 1492US8486191B2Substrate reactor with adjustable injectors for mixing gases within reaction chamberAGGARWAL RAVINDER·Filed 2009·Granted Jul 16, 2013·25 cites·29 claims
- 1588US8801857B2Self-centering susceptor ring assemblyAGGARWAL RAVINDER·Filed 2008·Granted Aug 12, 2014·12 cites·9 claims
- 1688US6465761B2Heat lamps for zone heatingASM INC·Filed 2001·Granted Oct 15, 2002·34 cites·44 claims
- 1787US8440048B2Load lock having secondary isolation chamberAGGARWAL RAVINDER·Filed 2010·Granted May 14, 2013·10 cites·20 claims
- 1887US8394229B2Susceptor ringAGGARWAL RAVINDER·Filed 2008·Granted Mar 12, 2013·13 cites·19 claims
- 1987US6609869B2Transfer chamber with integral loadlock and staging stationASM AMERICA·Filed 2001·Granted Aug 26, 2003·40 cites·24 claims
- 2087US6042324AMulti-stage single-drive FOUP door systemASM INC·Filed 1999·Granted Mar 28, 2000·91 cites·7 claims
- 2186US8088225B2Substrate support system for reduced autodoping and backside depositionGOODMAN MATT G·Filed 2009·Granted Jan 3, 2012·17 cites·13 claims
- 2286US8047706B2Calibration of temperature control system for semiconductor processing chamberASM INC·Filed 2008·Granted Nov 1, 2011·18 cites·28 claims
- 2385US6592318B2Docking cart with integrated load portASM INC·Filed 2001·Granted Jul 15, 2003·31 cites·17 claims
- 2482US6242718B1Wafer holderASM INC·Filed 1999·Granted Jun 5, 2001·62 cites·16 claims
- 2580US7449071B2Wafer holder with peripheral lift ringASM INC·Filed 2004·Granted Nov 11, 2008·20 cites·16 claims
- 2680US7159846B2Slit valve for a semiconductor processing systemASM INC·Filed 2005·Granted Jan 9, 2007·10 cites·20 claims
- 2779US7147720B2Non-contact cool-down station for wafersASM INC·Filed 2005·Granted Dec 12, 2006·6 cites·20 claims
- 2878US7993057B2Redundant temperature sensor for semiconductor processing chambersASM INC·Filed 2007·Granted Aug 9, 2011·6 cites·10 claims
- 2978US7018504B1Loadlock with integrated pre-clean chamberASM INC·Filed 2000·Granted Mar 28, 2006·22 cites·16 claims
- 3076US7585142B2Substrate handling chamber with movable substrate carrier loading platformASM INC·Filed 2007·Granted Sep 8, 2009·5 cites·14 claims
- 3176US6883776B2Slit valve for a semiconductor processing systemASM INC·Filed 2002·Granted Apr 26, 2005·19 cites·54 claims
- 3275US8262287B2ThermocoupleDARABNIA BUZ·Filed 2008·Granted Sep 11, 2012·9 cites·22 claims
- 3373US6879777B2Localized heating of substrates using opticsASM INC·Filed 2002·Granted Apr 12, 2005·16 cites·21 claims
- 3468US5091217AMethod for processing wafers in a multi station common chamber reactorADVANCED SEMICONDUCTOR MAT·Filed 1990·Granted Feb 25, 1992·51 cites·29 claims
- 3566US6521503B2High temperature drop-off of a substrateASM INC·Filed 2001·Granted Feb 18, 2003·9 cites·16 claims
- 3666US6158951AWafer carrier and method for handling of wafers with minimal contactASM INC·Filed 1998·Granted Dec 12, 2000·34 cites·20 claims
- 3764US6704496B2High temperature drop-off of a substrateASM INC·Filed 2002·Granted Mar 9, 2004·8 cites·12 claims
- 3863US6550158B2Substrate handling chamberASM INC·Filed 2000·Granted Apr 22, 2003·5 cites·10 claims
- 3963US6318957B1Method for handling of wafers with minimal contactASM INC·Filed 1999·Granted Nov 20, 2001·32 cites·13 claims
- 4062US9551069B2Reaction apparatus having multiple adjustable exhaust portsAGGARWAL RAVINDER·Filed 2011·Granted Jan 24, 2017·0 cites·25 claims
- 4160US6883250B1Non-contact cool-down station for wafersASM INC·Filed 2003·Granted Apr 26, 2005·6 cites·17 claims
- 4258US7231141B2High temperature drop-off of a substrateASM INC·Filed 2003·Granted Jun 12, 2007·6 cites·20 claims
- 4354US11387137B2Self-centering susceptor ring assemblyASM IP HOLDING BV·Filed 2014·Granted Jul 12, 2022·0 cites·20 claims
- 4452US2022172980A1Self-centering susceptor ring assemblyASM IP HOLDING BV·Filed 2022·Application pending·0 cites
- 4551US8927435B2Load lock having secondary isolation chamberASM INC·Filed 2013·Granted Jan 6, 2015·0 cites·23 claims
- 4651US2007207625A1Semiconductor processing apparatus with multiple exhaust pathsAGGARWAL RAVINDER·Filed 2006·Application pending·0 cites
- 4746US6162006AStackable cassette for use with wafer cassettesASM INC·Filed 1998·Granted Dec 19, 2000·12 cites·17 claims
- 4845US2009101633A1Reactor with small linear lamps for localized heat control and improved temperature uniformityASM INC·Filed 2007·Application pending·0 cites
- 4941US2006154385A1Fabrication pathway integrated metrology deviceAGGARWAL RAVINDER·Filed 2005·Application pending·0 cites
- 5041US2003194298A1Transfer chamber with integral loadlock and staging stationFiled 2003·Application pending·0 cites
Showing the top 50 of 57 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →