Inventor · disambiguated record
Shane C. Nevil
Also filed as: NEVIL SHANE · NEVIL SHANE C
9 granted patents·3 pending applications·39 citations·filing 2008–2016
85Inventor score
Files withAPPLIED MATERIALS INC5TAVASSOLI HAMID3BUCHBERGER DOUGLAS A1FOVELL RICHARD1MAHADESWARASWAMY CHETAN1
Top patents by PatentIndex Score
12 records- 0192US9358702B2Temperature management of aluminium nitride electrostatic chuckAPPLIED MATERIALS INC·Filed 2013·Granted Jun 7, 2016·14 cites·16 claims
- 0282US9338871B2Feedforward temperature control for plasma processing apparatusMAHADESWARASWAMY CHETAN·Filed 2010·Granted May 10, 2016·5 cites·14 claims
- 0382US8916793B2Temperature control in plasma processing apparatus using pulsed heat transfer fluid flowSILVEIRA FERNANDO M·Filed 2011·Granted Dec 23, 2014·7 cites·13 claims
- 0482US8822876B2Multi-zoned plasma processing electrostatic chuck with improved temperature uniformityTAVASSOLI HAMID·Filed 2011·Granted Sep 2, 2014·5 cites·20 claims
- 0579US8629370B2Assembly for delivering RF power and DC voltage to a plasma processing chamberTAVASSOLI HAMID·Filed 2011·Granted Jan 14, 2014·5 cites·20 claims
- 0669US10854425B2Feedforward temperature control for plasma processing apparatusAPPLIED MATERIALS INC·Filed 2016·Granted Dec 1, 2020·1 cites·8 claims
- 0765US9248509B2Multi-zoned plasma processing electrostatic chuck with improved temperature uniformityTAVASSOLI HAMID·Filed 2014·Granted Feb 2, 2016·1 cites·16 claims
- 0859US9214315B2Temperature control in plasma processing apparatus using pulsed heat transfer fluid flowAPPLIED MATERIALS INC·Filed 2014·Granted Dec 15, 2015·0 cites·7 claims
- 0954US8596336B2Substrate support temperature controlFOVELL RICHARD·Filed 2008·Granted Dec 3, 2013·1 cites·23 claims
- 1044US2013277333A1Plasma processing using rf return path variable impedance controller with two-dimensional tuning spaceAPPLIED MATERIALS INC·Filed 2013·Application pending·0 cites
- 1143US2013284369A1Two-phase operation of plasma chamber by phase locked loopAPPLIED MATERIALS INC·Filed 2012·Application pending·0 cites
- 1242US2013240144A1Fast response fluid temperature control systemBUCHBERGER DOUGLAS A·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →