Inventor · disambiguated record
Jeffrey D. Chinn
Also filed as: CHINN JEFFREY · CHINN JEFFREY D
71 granted patents·20 pending applications·3,135 citations·filing 1989–2017
99Inventor score
Files withAPPLIED MATERIALS INC53APPLIED MICROSTRUCTURES INC13KOBRIN BORIS7CHINN JEFFREY D3FAIRCHILD SEMICONDUCTOR2
Top patents by PatentIndex Score
91 records- 0198US6699399B1Self-cleaning etch processAPPLIED MATERIALS INC·Filed 2000·Granted Mar 2, 2004·500 cites·72 claims
- 0298US4933743AHigh performance interconnect system for an integrated circuitFAIRCHILD SEMICONDUCTOR·Filed 1989·Granted Jun 12, 1990·242 cites·9 claims
- 0397US7776396B2Controlled vapor deposition of multilayered coatings adhered by an oxide layerAPPLIED MICROSTRUCTURES INC·Filed 2005·Granted Aug 17, 2010·33 cites·42 claims
- 0495US7955704B2Controlled vapor deposition of biocompatible coatings for medical devicesLOWERY MICHAEL D·Filed 2009·Granted Jun 7, 2011·42 cites·7 claims
- 0595US7695775B2Controlled vapor deposition of biocompatible coatings over surface-treated substratesAPPLIED MICROSTRUCTURES INC·Filed 2005·Granted Apr 13, 2010·38 cites·21 claims
- 0694US9725805B2Apparatus and method for controlled application of reactive vapors to produce thin films and coatingsKOBRIN BORIS·Filed 2006·Granted Aug 8, 2017·15 cites·10 claims
- 0794US8298614B2Method of depositing a multilayer coating with a variety of oxide adhesion layers and organic layersKOBRIN BORIS·Filed 2010·Granted Oct 30, 2012·6 cites·16 claims
- 0894US6576489B2Methods of forming microstructure devicesAPPLIED MATERIALS INC·Filed 2001·Granted Jun 10, 2003·85 cites·19 claims
- 0994US6136211ASelf-cleaning etch processAPPLIED MATERIALS INC·Filed 1997·Granted Oct 24, 2000·160 cites·43 claims
- 1094US5117276AHigh performance interconnect system for an integrated circuitFAIRCHILD CAMERA INSTR CO·Filed 1990·Granted May 26, 1992·167 cites·20 claims
- 1193US7879396B2High aspect ratio performance coatings for biological microfluidicsAPPLIED MICROSTRUCTURES INC·Filed 2005·Granted Feb 1, 2011·16 cites·14 claims
- 1292US6902947B2Integrated method for release and passivation of MEMS structuresAPPLIED MATERIALS INC·Filed 2003·Granted Jun 7, 2005·89 cites·10 claims
- 1391US6318384B1Self cleaning method of forming deep trenches in silicon substratesAPPLIED MATERIALS INC·Filed 1999·Granted Nov 20, 2001·88 cites·35 claims
- 1490US8178162B2Controlled deposition of silicon-containing coatings adhered by an oxide layerKOBRIN BORIS·Filed 2009·Granted May 15, 2012·9 cites·15 claims
- 1590US7687110B2Method of in-line purification of CVD reactive precursor materialsAPPLIED MICROSTRUCTURES INC·Filed 2007·Granted Mar 30, 2010·9 cites·10 claims
- 1690US7413774B2Method for controlled application of reactive vapors to produce thin films and coatingsAPPLIED MICROSTRUCTURES INC·Filed 2004·Granted Aug 19, 2008·27 cites·21 claims
- 1789US7037854B2Method for chemical-mechanical jet etching of semiconductor structuresAPPLIED MATERIALS INC·Filed 2003·Granted May 2, 2006·38 cites·21 claims
- 1889US6518206B1Method for etching an anti-reflective coatingAPPLIED MATERIALS INC·Filed 2000·Granted Feb 11, 2003·37 cites·42 claims
- 1988US8545972B2Controlled vapor deposition of multilayered coatings adhered by an oxide layerKOBRIN BORIS·Filed 2010·Granted Oct 1, 2013·7 cites·18 claims
- 2088US5000818AMethod of fabricating a high performance interconnect system for an integrated circuitFAIRCHILD SEMICONDUCTOR·Filed 1990·Granted Mar 19, 1991·104 cites·29 claims
- 2187US8987029B2Protective thin films for use during fabrication of semiconductors, MEMS, and microstructuresCHINN JEFFREY D·Filed 2011·Granted Mar 24, 2015·7 cites·20 claims
- 2287US6583065B1Sidewall polymer forming gas additives for etching processesAPPLIED MATERIALS INC·Filed 1999·Granted Jun 24, 2003·105 cites·13 claims
- 2387US6372655B2Two etchant etch methodAPPLIED MATERIALS INC·Filed 2001·Granted Apr 16, 2002·31 cites·17 claims
- 2486US6824813B1Substrate monitoring method and apparatusAPPLIED MATERIALS INC·Filed 2000·Granted Nov 30, 2004·33 cites·40 claims
- 2585US6846746B2Method of smoothing a trench sidewall after a deep trench silicon etch processAPPLIED MATERIALS INC·Filed 2002·Granted Jan 25, 2005·36 cites·20 claims
- 2685US6699356B2Method and apparatus for chemical-mechanical jet etching of semiconductor structuresAPPLIED MATERIALS INC·Filed 2001·Granted Mar 2, 2004·28 cites·17 claims
- 2784US8071160B2Surface coating processCHINN JEFFREY D·Filed 2008·Granted Dec 6, 2011·17 cites·5 claims
- 2884US6037265AEtchant gas and a method for etching transistor gatesAPPLIED MATERIALS INC·Filed 1998·Granted Mar 14, 2000·54 cites·91 claims
- 2983US8323723B2Controlled vapor deposition of biocompatible coatings for medical devicesLOWERY MICHAEL D·Filed 2011·Granted Dec 4, 2012·6 cites·3 claims
- 3083US8067258B2Protective thin films for use during fabrication of semiconductors, MEMS, and microstructuresCHINN JEFFREY D·Filed 2006·Granted Nov 29, 2011·8 cites·27 claims
- 3183US6518190B1Plasma reactor with dry clean apparatus and methodAPPLIED MATERIALS INC·Filed 1999·Granted Feb 11, 2003·42 cites·3 claims
- 3283US6391788B1Two etchant etch methodAPPLIED MATERIALS INC·Filed 2000·Granted May 21, 2002·22 cites·61 claims
- 3383US5939647ASurface particle sampling head having a rotatable probeAPPLIED MATERIALS INC·Filed 1996·Granted Aug 17, 1999·68 cites·39 claims
- 3482US7638167B2Controlled deposition of silicon-containing coatings adhered by an oxide layerAPPLIED MICROSTRUCTURES INC·Filed 2004·Granted Dec 29, 2009·19 cites·14 claims
- 3582US6518192B2Two etchant etch methodAPPLIED MATERIALS INC·Filed 2001·Granted Feb 11, 2003·20 cites·18 claims
- 3681US6797188B1Self-cleaning process for etching silicon-containing materialFiled 2000·Granted Sep 28, 2004·32 cites·72 claims
- 3781US6245684B1Method of obtaining a rounded top trench corner for semiconductor trench etch applicationsAPPLIED MATERIALS INC·Filed 1998·Granted Jun 12, 2001·71 cites·38 claims
- 3880US6830950B2Integrated method for release and passivation of MEMS structuresAPPLIED MATERIALS INC·Filed 2002·Granted Dec 14, 2004·27 cites·38 claims
- 3980US6802933B2Apparatus for performing self cleaning method of forming deep trenches in silicon substratesFiled 2000·Granted Oct 12, 2004·19 cites·18 claims
- 4080US6666979B2Dry etch release of MEMS structuresAPPLIED MATERIALS INC·Filed 2001·Granted Dec 23, 2003·45 cites·28 claims
- 4180US6599437B2Method of etching organic antireflection coating (ARC) layersAPPLIED MATERIALS INC·Filed 2001·Granted Jul 29, 2003·25 cites·36 claims
- 4280US6541164B1Method for etching an anti-reflective coatingAPPLIED MATERIALS INC·Filed 1998·Granted Apr 1, 2003·48 cites·72 claims
- 4380US6235214B1Plasma etching of silicon using fluorinated gas mixturesAPPLIED MATERIALS INC·Filed 1999·Granted May 22, 2001·54 cites·27 claims
- 4479US7618548B2Silicon-containing structure with deep etched features, and method of manufactureAPPLIED MATERIALS INC·Filed 2005·Granted Nov 17, 2009·7 cites·7 claims
- 4579US6551941B2Method of forming a notched silicon-containing gate structureAPPLIED MATERIALS INC·Filed 2001·Granted Apr 22, 2003·27 cites·88 claims
- 4678US6322714B1Process for etching silicon-containing material on substratesAPPLIED MATERIALS INC·Filed 1998·Granted Nov 27, 2001·50 cites·65 claims
- 4778US6270634B1Method for plasma etching at a high etch rateAPPLIED MATERIALS INC·Filed 1999·Granted Aug 7, 2001·44 cites·24 claims
- 4877US6849554B2Method of etching a deep trench having a tapered profile in siliconAPPLIED MATERIALS INC·Filed 2002·Granted Feb 1, 2005·26 cites·34 claims
- 4975US7074723B2Method of plasma etching a deeply recessed feature in a substrate using a plasma source gas modulated etchant systemAPPLIED MATERIALS INC·Filed 2002·Granted Jul 11, 2006·18 cites·51 claims
- 5075US5223443AMethod for determining wafer cleanlinessINTEGRATED DEVICE TECH·Filed 1992·Granted Jun 29, 1993·63 cites·7 claims
Showing the top 50 of 91 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →