Inventor · disambiguated record
Steven M. Anella
Also filed as: ANELLA STEVEN · ANELLA STEVEN M · ANELLA STEVEN MICHAEL
23 granted patents·7 pending applications·41 citations·filing 1998–2021
92Inventor score
Files withAPPLIED MATERIALS INC10VARIAN SEMICONDUCTOR EQUIPMENT ASS INC5VARIAN SEMICONDUCTOR EQUIPMENT4BATEMAN NICHOLAS2FISH ROGER B2
Top patents by PatentIndex Score
30 records- 0186US9108322B2Force sensing system for substrate lifting apparatusVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Aug 18, 2015·9 cites·20 claims
- 0285US8008176B2Masked ion implant with fast-slow scanVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2010·Granted Aug 30, 2011·6 cites·14 claims
- 0384US8216923B2Integrated shadow mask/carrier for patterned ion implantationBATEMAN NICHOLAS·Filed 2010·Granted Jul 10, 2012·6 cites·20 claims
- 0480US11315819B2System apparatus and method for enhancing electrical clamping of substrates using photo-illuminationAPPLIED MATERIALS INC·Filed 2020·Granted Apr 26, 2022·1 cites·13 claims
- 0580US10109510B2Apparatus for improving temperature uniformity of a workpieceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted Oct 23, 2018·5 cites·17 claims
- 0674US9000446B2Techniques for processing a substrateRIORDON BENJAMIN B·Filed 2010·Granted Apr 7, 2015·1 cites·11 claims
- 0772US8354653B2Techniques for manufacturing solar cellsVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2009·Granted Jan 15, 2013·1 cites·18 claims
- 0871US8461553B2Masked ion implant with fast-slow scanBATEMAN NICHOLAS P T·Filed 2011·Granted Jun 11, 2013·2 cites·6 claims
- 0967US8202789B2Implanting a solar cell substrate using a maskANELLA STEVEN M·Filed 2009·Granted Jun 19, 2012·4 cites·4 claims
- 1064US8149256B2Techniques for changing temperature of a platenFISH ROGER B·Filed 2008·Granted Apr 3, 2012·2 cites·17 claims
- 1157US11473978B2Enhanced substrate temperature measurement apparatus, system and methodAPPLIED MATERIALS INC·Filed 2019·Granted Oct 18, 2022·0 cites·15 claims
- 1256US10826218B2Thermally insulating electrical contact probeVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Nov 3, 2020·0 cites·10 claims
- 1354US11875967B2System apparatus and method for enhancing electrical clamping of substrates using photo-illuminationAPPLIED MATERIALS INC·Filed 2020·Granted Jan 16, 2024·0 cites·20 claims
- 1453US9484183B2Linkage conduit for vacuum chamber applicationsVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted Nov 1, 2016·0 cites·18 claims
- 1551US11069554B1Carbon nanotube electrostatic chuckAPPLIED MATERIALS INC·Filed 2020·Granted Jul 20, 2021·0 cites·10 claims
- 1650US11651986B2System for isolating electrodes at cryogenic temperaturesAPPLIED MATERIALS INC·Filed 2021·Granted May 16, 2023·0 cites·20 claims
- 1750US11538714B2System apparatus and method for enhancing electrical clamping of substrates using photo-illuminationAPPLIED MATERIALS INC·Filed 2020·Granted Dec 27, 2022·0 cites·9 claims
- 1849US11557496B2Load lock with integrated featuresAPPLIED MATERIALS INC·Filed 2020·Granted Jan 17, 2023·0 cites·15 claims
- 1948US9338829B2Heated platen with improved temperature uniformityVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2014·Granted May 10, 2016·0 cites·20 claims
- 2047US11543296B2Method and apparatus for calibration of substrate temperature using pyrometerAPPLIED MATERIALS INC·Filed 2019·Granted Jan 3, 2023·0 cites·20 claims
- 2147US2012244692A1Integrated shadow mask/carrier for pattern ion implantationBATEMAN NICHOLAS·Filed 2012·Application pending·0 cites
- 2245US2010084117A1Platen cooling mechanism for cryogenic ion implantingFISH ROGER B·Filed 2008·Application pending·0 cites
- 2345US2021366757A1System apparatus and method for enhancing electrical clamping of substrates using photo-illuminationAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 2444US9633875B2Apparatus for improving temperature uniformity of a workpieceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Apr 25, 2017·0 cites·20 claims
- 2542US10032601B2Platen support structureVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted Jul 24, 2018·0 cites·14 claims
- 2641US2020381271A1System and apparatus for enhanced substrate heating and rapid substrate coolingAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 2737US2011320030A1Thermal Control of a Proximity Mask and Wafer During Ion ImplantationRIORDON BENJAMIN·Filed 2010·Application pending·0 cites
- 2835US2012043712A1Mechanism and method for aligning a workpiece to a shadow maskWEAVER WILLIAM·Filed 2010·Application pending·0 cites
- 2933US2006258128A1Methods and apparatus for enabling multiple process steps on a single substrateNUNAN PETER·Filed 2006·Application pending·0 cites
- 3031US5996206AMethod and apparatus for installing and aligning punches in an imaging systemAGFA CORP·Filed 1998·Granted Dec 7, 1999·4 cites·32 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →