Inventor · disambiguated record
Victor J. Theriault
Also filed as: THERIAULT VICTOR · THERIAULT VICTOR J
6 granted patents·105 citations·filing 1998–2021
82Inventor score
Top patents by PatentIndex Score
6 records- 0185US9807864B1Electrode, accelerator column and ion implantation apparatus including sameVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Granted Oct 31, 2017·6 cites·19 claims
- 0277US6530732B1Single substrate load lock with offset cool module and buffer chamberBROOKS AUTOMATION INC·Filed 1998·Granted Mar 11, 2003·59 cites·17 claims
- 0356US6079928ADual plate gas assisted heater moduleBROOKS AUTOMATION INC·Filed 1998·Granted Jun 27, 2000·24 cites·27 claims
- 0455US6231289B1Dual plate gas assisted heater moduleBROOKS AUTOMATION INC·Filed 2000·Granted May 15, 2001·6 cites·11 claims
- 0544US12046443B2Shield for filament in an ion sourceAPPLIED MATERIALS INC·Filed 2021·Granted Jul 23, 2024·0 cites·10 claims
- 0640US5931626ARobot mounting de-coupling techniqueBROOKS AUTOMATION INC·Filed 1998·Granted Aug 3, 1999·10 cites·11 claims
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