Inventor · disambiguated record
Sumie Nagaseki
Also filed as: NAGASEKI SUMIE
4 granted patents·5 pending applications·10 citations·filing 2007–2014
68Inventor score
Top patents by PatentIndex Score
9 records- 0168US8242026B2Semiconductor device manufacturing method, semiconductor manufacturing apparatus and storage mediumNAGASEKI SUMIE·Filed 2007·Granted Aug 14, 2012·5 cites·16 claims
- 0264US9343295B2Vaporizing unit, film forming apparatus, film forming method, computer program and storage mediumTOKYO ELECTRON LTD·Filed 2014·Granted May 17, 2016·1 cites·6 claims
- 0363US8293662B2Method of manufacturing semiconductor device, apparatus for manufacturing same, and storage mediumNAGASEKI SUMIE·Filed 2008·Granted Oct 23, 2012·3 cites·8 claims
- 0451US8818545B2Semiconductor fabrication apparatus and temperature adjustment methodMATSUZAKI KAZUYOSHI·Filed 2010·Granted Aug 26, 2014·1 cites·10 claims
- 0551US2010297346A1Vaporizing unit, film forming apparatus, film forming method, computer program and storage mediumTOKYO ELECTRON LTD·Filed 2008·Application pending·0 cites
- 0651US2010321029A1Plasma measuring method, plasma measuring device and storage mediumTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 0745US2010267243A1Plasma processing method and apparatusTOKYO ELECTRON LTD·Filed 2008·Application pending·0 cites
- 0845US2011201208A1Plasma etching method and plasma etching apparatusTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 0928US2012204576A1Cooling unit, processing chamber, part in the processing chamber, and cooling methodMATSUZAKI KAZUYOSHI·Filed 2012·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Sumie Nagaseki files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →